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US 11,450,508 B2Granted
Comparative holographic imaging
AssigneeFEI Company
InventorAlan Bahm
Life of this patent
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Abstract
Apparatuses and methods for comparative holographic imaging to improve structural and molecular information of reconstructions is disclosed herein. An example method at least includes acquiring a plurality of holograms of a sample, wherein each hologram of the plurality of holograms is acquired at a different electron beam energy, and determining atomic and structural information of the sample based at least on a comparison of at least two of the holograms of the plurality of holograms.
Claims18
A method comprising:
- acquiring, with an electron beam, a plurality of holograms of a sample, wherein each hologram of the plurality of holograms is acquired at a different electron beam energy;
- and
- determining atomic and structural information of the sample based at least on a comparison of at least two of the holograms of the plurality of holograms, wherein the atomic information provides information about the atoms forming the sample and bonding information.
An apparatus comprising:
- an emitter coupled to emit an electron beam toward a sample;
- a detector coupled to receive the electron beam after interacting with the sample;
- and
- a controller coupled to the emitter and detector, the controller including code that, when executed, causes the controller to:
- acquire, with an electron beam, a plurality of holograms of a sample, wherein each hologram of the plurality of holograms is acquired at a different electron beam energy;
- and
- determine atomic and structural information of the sample based at least on a comparison of at least two of the holograms of the plurality of holograms, wherein the atomic information provides information about the atoms forming the sample and bonding information.
4 more elements
Dependencies are inferred from the claim text.