Target formation apparatus
AssigneeASML Netherlands B.V.
InventorGeorgiy Olegovich Vaschenko
Life of this patent
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Abstract
A system for an extreme ultraviolet light source includes a capillary tube, the capillary tube including a sidewall extending from a first end to a second end, the sidewall including an exterior wall and an interior wall, the interior wall defining a passage that extends from the first end to the second end; an actuator configured to be positioned at the exterior wall of the capillary tube; and an adhesive between the exterior wall and the actuator, the adhesive being configured to mechanically couple the actuator and the capillary tube, wherein the adhesive occupies a volume that remains substantially the same or expands as a result of curing.
Claims21
A system for an extreme ultraviolet light source, the system comprising:
- a capillary tube, the capillary tube comprising a sidewall extending from a first end to a second end, the sidewall comprising an exterior wall and an interior wall, the interior wall defining a passage that extends from the first end to the second end;
- an actuator configured to be positioned at the exterior wall of the capillary lube;
- and
- an adhesive between the exterior wall and the actuator, the adhesive being configured to mechanically couple the actuator and the capillary tube, wherein the adhesive occupies a volume that remains substantially the same or expands as a result of curing.
A system for an extreme ultraviolet light source, the system comprising:
- a tube comprising a sidewall extending from a first opening at a first end to a second opening at a second end, the sidewall comprising an exterior wall and an interior wall, the interior wall defining a passage that extends from the first end to the second end;
- an actuator that surrounds a portion of the exterior wall of the tube;
- and
- an adhesive that fills a region between the portion of the exterior wall and the actuator such that the adhesive is in contact with the portion of the exterior waif and the actuator, wherein, during operational use:
- molten metal target material flows into the second opening of the tube and out of the first opening of the tube while the actuator vibrates the tube to form a stream of target material droplets, and the adhesive remains in contact with the portion of the exterior w all and the actuator.
An extreme ultraviolet light source comprising:
- a vacuum vessel;
- and
- a target material supply system configured to supply target material to an interior of the vacuum vessel, the target material supply system comprising:
- a reservoir configured to hold molten target material and to apply pressure to the molten target material, the molten target material emitting extreme ultraviolet light when in a plasma state;
- and
- a droplet generator comprising:
- a capillary tube, the capillary tube comprising a sidewall extending from a first end to a second end, the sidewall comprising an exterior wall and an interior wall, the interior wall defining a passage that extends from the first end to the second end, the passage configured to receive molten target material from the reservoir;
- an actuator configured to be positioned at the exterior wall of the capillary lube;
- and
- an adhesive that has a volume that remains substantially the same or expands as a result of curing, the adhesive being between the exterior wall and the actuator, and the adhesive being configured to mechanically couple the actuator and the capillary tube.
Dependencies are inferred from the claim text.