Resist composition and method of forming resist pattern

A resist composition which generates acid upon exposure and exhibits changed solubility in a developing solution under action of acid, the resist composition comprising:

• a base component (A) which exhibits changed solubility m a developing solution under action of acid, and
• an acid generator component (B) which generates acid upon exposure,
• the base component (A) comprising a resin component (A1) comprising a structural unit (a0) represented by general formula (a0) shown below, and
• the acid generator component (B) comprising at least one member selected from the group consisting of a compound (b-1) represented by general formula (b-1) shown below, a compound (b-2) represented by general formula (b-2) shown below and a compound (b-3) represented by general formula (b-3) shown below:
• wherein R0 represents a hydrogen atom, an alkyl group of 1 to 5 carbon atoms or a halogenated alkyl group of 1 to 5 carbon atoms;
• Vax0 represents a single bond or a divalent linking group;
• Wa is a divalent aromatic hydrocarbon group represented by the formula:
• wherein *1 represents a bonding site to which Vax0 is bonded, and *2 represents a bonding site to which —C(═O)—O (-Va0-C(═O)—O—na0-Ra00 is bonded, provided that a hydrogen atom bonded to the benzene ring in the divalent aromatic hydrocarbon group represented by the above formula may be substituted with a substituent;
• Va0 represents a divalent hydrocarbon group which may have an ether bond;
• na0 represents an integer of 0 to 2;
• and Ra00 is a group represented by general formula (a1-r2-1) shown below, a group represented by general formula (a1-r2-2) shown below, a group represented by general formula (a1-r2-3) shown below or a group represented by general formula (a1-r2-4) shown below:
• wherein Ra′10 represents an alkyl group having 1 to 10 carbon atoms;
• Ra′11 is a group which forms an aliphatic cyclic group together with a carbon atom having Ra′10 bonded thereto, or a fused cyclic group in which an aromatic ring is fused with the alicyclic group;
• Ya represents a carbon atom;
• Xa represents a group which forms a monocyclic aliphatic hydrocarbon group together with Ya, provided that part or all of the hydrogen atoms of the monocyclic aliphatic hydrocarbon group may be substituted;
• Ra01 to Ra03 each independently represents a hydrogen atom, a monovalent saturated chain hydrocarbon group of 1 to 10 carbon atoms or a monovalent saturated aliphatic cyclic hydrocarbon group of 3 to 20 carbon atoms, provided that part or all of the hydrogen atoms of the saturated chain hydrocarbon or the saturated aliphatic cyclic hydrocarbon may be substituted;
• two or more of Ra01 to Ra03 may be mutually bonded to form a cyclic structure;
• Yaa represents a carbon atom;
• Xaa represents a group which forms an aliphatic cyclic group together with Yaa;
• Ra04 represents an aromatic hydrocarbon group which may have a substituent;
• Ra′12 and Ra′13 each independently represent a monovalent chain saturated hydrocarbon group having 1 to 10 carbon atoms, provided that part or all of the hydrogen atoms of the saturated hydrocarbon group may be substituted;
• Ra′14 represents an aromatic hydrocarbon group which may have a hydrogen atom substituted with a substituent;
• and * represents a bonding site;
• wherein R101, R104 and R106 each independently represents a hydrocarbon group containing an aromatic ring which may have a substituent;
• R105, R107 and R108 each independently represents a cyclic group which may have a substituent, a chain alkyl group which may have a substituent or a chain alkenyl group which may have a substituent;
• R102 represents a fluorine atom or a fluorinated alkyl group of 1 to 5 carbon atoms;
• Y101 represents a single bond or a divalent linking group containing an oxygen atom;
• V101 to V103 each independently represents a single bond, an alkylene group or a fluorinated alkylene group;
• L101 and L102 each independently represents a single bond or an oxygen atom;
• L103 and L105 each independently represents a single bond, —CO— or —SO2—;
• m represents an integer of 1 or more;
• and M′m+ represents an m-valent onium cation.