Bonded bodies for optical modulators, optical modulators and a method of producing bonded bodies for optical modulators
AssigneeNGK Insulators, Ltd.
InventorsTomoyoshi Tai, Yudai Uno, Jungo Kondo, Yoshimasa Kobayashi, Tatsuya Hishiki, Hiroharu Kobayashi
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Abstract
A bonded body for an optical modulator includes a supporting substrate, an optical waveguide material provided on the supporting substrate and composed of lithium niobate, lithium tantalate and lithium niobate-lithium tantalate, and an optical waveguide in the optical waveguide material. The supporting substrate is composed of a material selected from the group consisting of magnesium oxide and a magnesium-silicon composite oxide.
Claims8
A bonded body for an optical modulator, said bonded body comprising:
- a supporting substrate;
- an optical waveguide material provided on said supporting substrate and comprising a material selected from the group consisting of lithium niobate, lithium tantalate and lithium niobate-lithium tantalate;
- and
- an optical waveguide in said optical waveguide material,
- wherein said supporting substrate comprises a material selected from the group consisting of steatite and forsterite, so as to provide an improved bandwidth of electro-optic modulation by the optical modulator.
A method of producing a bonded body for an optical modulator, said method comprising the steps of:
- bonding a supporting substrate comprising a material selected from the group consisting of steatite and forsterite, so as to provide an improved bandwidth of electro-optic modulation by the optical modulator, and an optical waveguide material comprising a material selected from the group consisting of lithium niobate, lithium tantalate and lithium niobate-lithium tantalate;
- and
- providing an optical waveguide in said optical waveguide material.
Dependencies are inferred from the claim text.