Semiconductor device and method for manufacturing semiconductor device
AssigneeMitsubishi Electric Corporation
InventorKazuyuki Onoe
Life of this patent
Estimating the term…
Abstract
A semiconductor device according to the present invention includes a substrate, an active layer provided on the substrate, a cladding layer provided on the active layer, a contact layer provided on the cladding layer, the contact layer having an upper surface, a back surface which is a surface on an opposite side to the upper surface, and a side surface connecting the upper surface and the back surface, the contact layer is larger in width than the cladding layer; and an electrode that is in contact with the upper surface of the contact layer and the side surface of the contact layer from an upper end to a lower end of the side surface of the contact layer.
Claims8
A semiconductor device comprising:
- a substrate;
- an active layer provided on the substrate;
- a cladding layer provided on the active layer;
- an insulating film covering a side surface of the cladding layer and an upper surface of the active layer;
- a contact layer provided on the cladding layer, the contact layer having an upper surface, a back surface which is a surface on an opposite side to the upper surface and is at a same height as an upper end of the cladding layer, and a side surface connecting the upper surface and the back surface, the contact layer is larger in width than a total width of the cladding layer and the insulating film and includes an overhang portion that protrudes from an upper surface of the cladding layer beyond the insulating film;
- and
- an electrode that is in contact with the upper surface of the contact layer and the side surface of the contact layer from an upper end to a lower end of the side surface of the contact layer and does not contact the insulating film on a portion of the upper surface of the active layer at which the cladding layer is not provided.
A method for manufacturing a semiconductor device comprising the steps of:
- forming an active layer on a substrate;
- forming a cladding layer on the active layer;
- forming a contact layer on the cladding layer, the contact layer having an upper surface, a back surface which is a surface on an opposite side to the upper surface and is at a same height as an upper end of the cladding layer, and a side surface connecting the upper surface and the back surface, the contact layer being larger in width than the cladding layer;
- forming an insulating film in such a manner that the insulating film covers a side surface of the cladding layer and an upper surface of the active layer;
- and
- forming an electrode by electroless plating in such a manner that the electrode contacts the upper surface, the side surface and the back surface of the contact layer, and does not contact the insulating film on a portion of the upper surface of the active layer at which the cladding layer is not provided,
- the contact layer is larger in width than a total width of the cladding layer and the insulating film and includes an overhang portion that protrudes from an upper surface of the cladding layer beyond the insulating film.
Dependencies are inferred from the claim text.