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US 11,448,836 B2Granted
Probe device and test device including the same comprising an optical fiber inserted into a hole of an intermediate substrate having a probe mirror
AssigneeSamsung Electronics Co., Ltd.
InventorsHo Chul Ji, Keun Yeong Cho
Life of this patent
Estimating the term…
Abstract
A probe device includes an optical fiber array including an optical fiber to be in optical communication with an optical integrated circuit board, the optical integrated circuit board including an optical coupling element and a reflection mirror, a base substrate fixing the optical fiber, and an intermediate substrate including a hole into which the optical fiber is inserted, and a probe mirror to reflect an optical signal between the reflection mirror and the optical coupling element.
Claims19
A probe device, comprising:
- an optical fiber array including an optical fiber to be in optical communication with an optical integrated circuit board, the optical integrated circuit board including an optical coupling element and a reflection mirror;
- a base substrate fixing the optical fiber;
- and
- an intermediate substrate including a hole into which the optical fiber is inserted, and a probe mirror to reflect an optical signal between the reflection mirror and the optical coupling element.
1 more element
A test device, comprising:
- a light source outputting an optical signal for testing an optical integrated circuit board having a waveguide including a first optical coupling element and a second optical coupling element, a first reflection mirror adjacent to the first optical coupling element, and a second reflection mirror adjacent to the second optical coupling element;
- an optical fiber array including an optical fiber outputting the optical signal to be incident on the first reflection mirror;
- a base substrate fixing the optical fiber;
- an intermediate substrate between the optical fiber array and the optical integrated circuit board, and having a hole, into which at least a region of the optical fiber is inserted, and a probe mirror reflecting the optical signal, reflected by the first reflection mirror, to be incident on the first optical coupling element;
- a photodetector to detect the optical signal propagating in the waveguide output by the second optical coupling element;
- and
- a controller to inspect the optical integrated circuit board based on the optical signal detected by the photodetector.
4 more elements
Dependencies are inferred from the claim text.