US 11,448,806 B1 · Fabrication of self-aligned grating elements with high refractive index for waveguide displays

Abstract

A lithographic patterning of a resist is performed to create a mandrel over a substrate. A deposition of one or more functional materials on the mandrel is performed. And each functional material has a respective refractive index. A selective removal of the mandrel is performed to create a plurality of grating elements formed from the one or more functional materials. The plurality of grating elements are self-aligned and form a diffraction grating. Each grating element may have a heterogenous refractive index (e.g., substantial normal to and/or parallel to a surface of the substrate). The diffraction grating may be used in a near-eye display.

Claims17

Dependent claims

A method comprising:

performing a deposition of a photo-sensitive material on a substrate;
performing a patterning of the photo-sensitive material to create a mandrel over the substrate;
upon the creation of the mandrel, performing a deposition of a plurality of functional materials on the substrate;
upon the deposition of the functional materials, performing a removal of portions of the functional materials prior to a removal of the entire mandrel from the substrate;
and;
upon the removal of the functional materials, performing the removal of the entire mandrel to create an array of grating elements on the substrate without the mandrel that forms a diffracting grating.

3 more elements

Dependencies are inferred from the claim text.

Facts

Application

17/202,179Filed 15 Mar 2021 · continuation

Priority

21 Nov 2017

Granted

20 Sep 2022

Term ends

Not estimatedThe source records don’t support an estimate.

Classification18 codes

G02B 5/1857
Manufacturing methods: using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams
G03F 7/0005
Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g.…
B29D 11/00769
Production of other optical elements not provided for in B29D11/00009- B29D11/0073: producing diffraction gratings
G02B 6/00
Light guides

Fabrication of self-aligned grating elements with high refractive index for waveguide displays

Life of this patent

Fabrication of self-aligned grating elements with high refractive index for waveguide displays

Life of this patent

Abstract

Claims17