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US 11,448,695 B2Granted
System for testing an integrated circuit of a device and its method of use
AssigneeAehr Test Systems
InventorsScott E. Lindsey, Jovan Jovanovic, David S. Hendrickson, Donald P. Richmond, II
Life of this patent
Estimating the term…
Abstract
A cartridge, including a cartridge frame, formations on the cartridge frame for mounting the cartridge frame in a fixed position to an apparatus frame, a contactor support structure, a contactor interface on the contactor support structure, a plurality of terminals, held by the contactor support structure, for contacting contacts on a device, and a plurality of conductors, held by the contactor support structure, connecting the interface to the terminals.
Claims35
A method of testing an integrated circuit of a device, comprising:
- adjusting the force of at least one spring that connects a piston to a cylinder to level the piston relative to the cylinder;
- holding the device against a surface of a holder;
- actuating the actuator by moving the piston within the cylinder, thereby moving a contactor support structure relative to an apparatus frame and urging terminals on the contactor support structure against contacts on the device;
- and
- providing signals through the terminals and contacts to the integrated circuit.
2 more elements
An apparatus for testing an integrated circuit of a device, comprising:
- an apparatus frame;
- a holder for the device, secured to the apparatus frame;
- a contactor support structure held by the apparatus frame;
- a plurality of terminals held by the contactor support structure, the holder and contactor support structure being movable relative to one another so that each one of the terminals makes releasable contact with a respective contact of the device;
- an actuator connected between the apparatus frame and the contactor support structure, having a piston and a cylinder so that the cylinder and the piston jointly define a volume, the piston and the cylinder being movable relative to one another to move the contactor support structure relative to the apparatus frame and toward the surface of the holder so that the terminals are urged against contacts of the device;
- a spring;
- a spring adjustment mechanism having a first portion secured to the piston and a second portion connected to the spring, the spring adjustment mechanism being adjustable to adjust a force of the spring and level the piston relative to the cylinder;
- a fluid line connected to the volume to modify a pressure of the volume and move the piston relative to the cylinder;
- a power source;
- a power electrical path connecting the power source to a power terminal of the terminals held by the support structure;
- a signal source;
- and
- a plurality of signal electrical paths, each connecting the signal source to a respective signal terminal of the terminals held by the support structure.
10 more elements
A cartridge, comprising:
- a cartridge frame;
- formations on the cartridge frame for mounting the cartridge frame in a fixed position to an apparatus frame;
- a contactor support structure;
- a contactor interface on the contactor support structure;
- an actuator connected between the cartridge frame and the contactor support structure, having a piston and a cylinder so that the cylinder and the piston jointly define a volume, the piston and the cylinder being movable relative to one another to move the contactor support structure relative to the apparatus frame and toward the surface of the holder so that the terminals are urged against contacts of the device, wherein a cross-sectional surface area of the volume normal to a direction of movement of the piston relative to the cylinder is modifiable;
- a spring;
- a spring adjustment mechanism, having a first portion secured to the piston and a second portion connected to the spring, the spring adjustment mechanism being adjustable to adjust a force of the spring and level the piston relative to the cylinder;
- a plurality of terminals, held by the contactor support structure, for contacting contacts on a device;
- and
- a plurality of conductors, held by the contactor support structure, connecting the interface to the terminals.
7 more elements
Dependencies are inferred from the claim text.