Thermal sensor

An apparatus for calibrating the thermal sensor, the apparatus comprising:

• a memory device storing instructions for calibrating the thermal sensor;
• and
• a processor connected to the memory device, wherein the processor is operative to execute the instructions, wherein, when executed, the instructions cause to:
• determine a first incremental voltage for a diode array at a first temperature;
• determine a first incremental voltage for a device under test at the first temperature, the device under test comprising the thermal sensor operative to determine a temperature of the device under test;
• determine a first slope from the first incremental voltage of the diode array;
• heat both the diode array and the device under test;
• determine a second incremental voltage for the diode array after heating the diode array;
• determine a first incremental temperature based on the second incremental voltage for the diode array and the first slope;
• determine a second incremental voltage for the device under test after heating the device under test;
• determine a second slope from the second incremental voltage for the device under test and the first change in temperature;
• and
• determine a temperature error for the thermal sensor based on the second slope.

A calibration system for calibrating a thermal sensor, the calibration system comprising:

• a diode array;
• a heater placed between the diode array and a device under test;
• a probe operative to:
• extract an incremental voltage to temperature curve for the diode array from a first incremental voltage of the diode array at a first temperature;
• determine, after heating the diode array using the heater, a first incremental temperature from the incremental voltage to temperature curve for the diode array and a second incremental voltage of the diode array after heating the diode array;
• extract an incremental voltage to temperature curve for the device under test from the first incremental temperature, a first incremental voltage for the device under test at the first temperature, and a second incremental voltage of the device under test after heating the device under test;
• and
• determine a temperature error for a thermal sensor of the device under test from the incremental voltage to temperature curve for the device under test.