RDSON/dRON measurement method and circuit for high voltage HEMTs

A method, comprising:

• coupling a transistor in a series circuit with a capacitor and a resistor;
• coupling a voltage source to the capacitor to charge the capacitor to a non-zero DC voltage while the transistor is turned off;
• disconnecting the voltage source from the capacitor while the transistor is turned off;
• turning the transistor on while the voltage source is disconnected from the capacitor;
• measuring a voltage signal across the resistor while the transistor is turned on;
• and
• determining a test result indicating whether the transistor has an acceptable dynamic on-state resistance according to the voltage signal across the resistor.

A method of manufacturing an electronic device, the method comprising:

• processing a wafer to fabricate a transistor on or in the wafer;
• separating a die from the wafer, the die including the transistor;
• packaging the die to create a packaged electronic device;
• coupling the transistor in a series circuit with a capacitor and a resistor;
• coupling a voltage source to the capacitor to charge the capacitor to a non-zero DC voltage while the transistor is turned off;
• disconnecting the voltage source from the capacitor while the transistor is turned off;
• turning the transistor on while the voltage source is disconnected from the capacitor;
• measuring a voltage signal across the resistor while the transistor is turned on;
• and
• determining a test result indicating whether the transistor has an acceptable dynamic on-state resistance according to the voltage signal across the resistor.

A method of manufacturing an electronic device, the method comprising:

• processing a wafer to fabricate a transistor on or in the wafer;
• coupling the transistor in a series circuit with a capacitor and a resistor;
• coupling a voltage source to the capacitor to charge the capacitor to a non-zero DC voltage while the transistor is turned off;
• disconnecting the voltage source from the capacitor while the transistor is turned off;
• turning the transistor on while the voltage source is disconnected from the capacitor;
• measuring a voltage signal across the resistor while the transistor is turned on;
• and
• determining a test result indicating whether the transistor has an acceptable dynamic on-state resistance according to the voltage signal across the resistor.