Ultrasonic device and inspection device
AssigneeKabushiki Kaisha Toshiba
InventorsKazuhiro Itsumi, Yasuharu Hosono, Tomio Ono, Mitsunaga Saito
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Abstract
According to one embodiment, an ultrasonic device includes an ultrasonic transmitter. The ultrasonic transmitter includes a first element, a second element, and a driver. The first element is flexing-vibratable at a first resonant frequency. The second element is flexing-vibratable at a second resonant frequency different from the first resonant frequency. The driver is configured to supply a first electrical signal to the first element and to supply a second electrical signal to the second element. The first electrical signal includes a first signal having the first resonant frequency. The second electrical signal includes a second signal having the second resonant frequency.
Claims20
An ultrasonic device, comprising:
- an ultrasonic transmitter, the ultrasonic transmitter including a first element;
- a second element;
- a supporter;
- and a driver,
- the first element including a first member region;
- a first electrode;
- a first counter electrode provided between the first member region and the first electrode;
- and a first piezoelectric layer provided between the first electrode and the first counter electrode and supported by the supporter,
- the second element including a second member region;
- a second electrode;
- a second counter electrode provided between the second member region and the second electrode;
- and a second piezoelectric layer provided between the second electrode and the second counter electrode and supported by the supporter,
- the driver being configured to supply a first electrical signal between the first electrode and the first counter electrode and to supply a second electrical signal between the second electrode and the second counter electrode, the second electrical signal being different from the first electrical signal,
- the second element having at least one of a second length or a second thickness, the second length being different from a first length, the second thickness being different from a first thickness,
- the first length being a length of the first piezoelectric layer along a second direction crossing a first direction, the first direction being from the first counter electrode toward the first electrode,
- the second length being a length of the second piezoelectric layer along the second direction,
- the first thickness being a thickness of the first member region along the first direction,
- the second thickness being a thickness of the second member region along the first direction,
- the supporter including a first hole and a second hole,
- the first electrode overlapping the first hole in the first direction,
- the second electrode overlapping the second hole in the first direction,
- the first piezoelectric layer including a first region and a second region, the first region overlapping the first hole in the first direction, the first region not overlapping the first electrode in the first direction, and the second region overlapping a part of the supporter in the first direction, and
- the second piezoelectric layer including a third region and a fourth region, the third region overlapping the second hole in the first direction, the third region not overlapping the second electrode in the first direction, and the fourth region overlapping another part of the supporter in the first direction.
An ultrasonic device, comprising:
- an ultrasonic transmitter, the ultrasonic transmitter including a first element, a second element, a supporter, and a driver,
- the first element including a first member region, a first electrode, a first counter electrode provided between the first member region and the first electrode, and a first piezoelectric layer provided between the first electrode and the first counter electrode and supported by the supporter;
- the second element including a second member region, a second electrode, a second counter electrode provided between the second member region and the second electrode, and a second piezoelectric layer provided between the second electrode and the second counter electrode and supported by the supporter;
- the driver being configured to supply a first electrical signal between the first electrode and the first counter electrode and to supply a second electrical signal between the second electrode and the second counter electrode, the second electrical signal being different from the first electrical signal;
- the second element having at least one of a second length or a second thickness, the second length being different from a first length, the second thickness being different from a first thickness;
- the first length being a length of the first piezoelectric layer along a second direction crossing a first direction, the first direction being from the first counter electrode toward the first electrode;
- the second length being a length of the second piezoelectric layer along the second direction;
- the first thickness being a thickness of the first member region along the first direction;
- the second thickness being a thickness of the second member region along the first direction;
- the supporter including a first hole and a second hole;
- the first electrode overlapping the first hole in the first direction;
- the second electrode overlapping the second hole in the first direction;
- the first piezoelectric layer including a first region overlapping the first hole in the first direction, the first region not overlapping the first electrode in the first direction;
- and
- the second piezoelectric layer including a second region overlapping the second hole in the first direction, the second region not overlapping the second electrode in the first direction,
- wherein the first electrical signal includes a first signal having a first frequency and substantially not including a second frequency, and
- the second electrical signal includes a second signal having the second frequency and substantially not including the first frequency.
Dependencies are inferred from the claim text.