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US 11,448,619 B2Granted
Substance detecting element
AssigneeDai-Ichi Seiko Co., Ltd.
InventorsKenji Ogata, Shogo Kurogi
Life of this patent
Estimating the term…
Abstract
A through-hole (3) is disposed in a supporting substrate (2). Plate-shaped beams (4 (4A, 4B)) each includes a piezoelectric element, extends from an edge of the through-hole (3) toward an opposite edge to close a part of the through-hole (3), supports a substance adsorption film to which a constitutive substance to be detected adheres, and has a vibration frequency that is varied due to adhesion of the constitutive substance to the substance adsorption film. Drive electrodes (16) apply a voltage to the piezoelectric element to vibrate and deform the beams (4). Detection electrodes (17) detect information about the vibration frequencies of the beams (4).
Claims11
A substance detecting element comprising:
- a supporting substrate in which a through-hole is disposed;
- and
- a plate-shaped beam that comprises a piezoelectric element, the beam extending from an edge of the through-hole toward an opposite edge to close a part of the through-hole and supporting a substance adsorption film to which a substance to be detected adheres, and the beam having a vibration frequency that is varied due to adhesion of the substance to the substance adsorption film, wherein
- the beam comprises an elongated plate-shaped first beam having both ends fixed to edges of the through-hole and provided with an electrode on at least one of both the ends and an elongated plate-shaped second beam having both ends fixed to edges of the through-hole and provided with an electrode on at least one of both the ends, the second beam intersecting the first beam,
- the electrode provided on the first beam applies a voltage to the piezoelectric element to vibrate and deform the beam,
- the electrode provided on the second beam detects information about a vibration frequency of the beam,
- a width of the first beam is set to be wider than a width of the second beam, and.
4 more elements
A substance detecting element comprising:
- a supporting substrate in which a through-hole is disposed;
- and
- a plate-shaped beam that comprises a piezoelectric element, the beam extending from an edge of the through-hole toward an opposite edge to close a part of the through-hole and supporting a substance adsorption film to which a substance to be detected adheres, and the beam having a vibration frequency that is varied due to adhesion of the substance to the substance adsorption film, wherein
- the beam comprises an elongated plate-shaped first beam having both ends fixed to edges of the through-hole and provided with an electrode on at least one of both the ends and an elongated plate-shaped second beam having both ends fixed to edges of the through-hole and provided with an electrode on at least one of both the ends, the second beam intersecting the first beam,
- the electrode provided on the first beam applies a voltage to the piezoelectric element to vibrate and deform the beam,
- the electrode provided on the second beam detects information about a vibration frequency of the beam,
- the electrode is formed on both the ends of one beam of the first beam or the second beam,
- a lead wire is formed on the one beam, the lead wire connecting a plurality of the electrodes formed on both the ends of the one beam, and
- a lead wire that is electrically connected to one electrode of the plurality of electrodes formed on both the ends of the one beam is drawn to outside of the one beam.
6 more elements
A substance detecting element comprising:
- a supporting substrate in which a through-hole is disposed;
- and
- a plate-shaped beam that comprises a piezoelectric element, the beam extending from an edge of the through-hole toward an opposite edge to close a part of the through-hole and supporting a substance adsorption film to which a substance to be detected adheres, and the beam having a vibration frequency that is varied due to adhesion of the substance to the substance adsorption film, wherein
- a plurality of the through-holes is disposed in the supporting substrate, each of the plurality of the through-holes is provided with the beam, and each beam supports a different kind of the substance adsorption film.
1 more element
A substance detecting element comprising:
- a supporting substrate in which a through-hole is disposed;
- and
- a plate-shaped beam that comprises a piezoelectric element, the beam extending from an edge of the through-hole toward an opposite edge to close a part of the through-hole and supporting a substance adsorption film to which a substance to be detected adheres, and the beam having a vibration frequency that is varied due to adhesion of the substance to the substance adsorption film, wherein
- a plurality of the through-holes is disposed in the supporting substrate,
- a plurality of the beams is disposed,
- the through-holes are provided with the respective beams, and
- the through-holes include through-holes that have mutually different hole sizes.
4 more elements
Dependencies are inferred from the claim text.