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US 11,448,560 B2Granted
Strain gauge and sensor module
AssigneeMINEBEA MITSUMI Inc.
InventorsYuta Aizawa, Atsushi Kitamura, Eiji Misaizu, Akiyo Yuguchi
Life of this patent
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Abstract
A strain gauge includes a flexible substrate, and a plurality of resistors each formed of a Cr composite film, on or above the substrate. The substrate is attached to a flexure element, the plurality of resistors including two resistors disposed at locations at which the two resistors are opposite to each other, such that the flexure element is interposed between the two resistors.
Claims13
A strain gauge comprising:
- a flexible substrate;
- and
- a plurality of resistors each formed of a film containing Cr, CrN, and Cr2N, on or above the substrate, the resistance of each resistor changing in accordance with a strain;
- and
- pairs of terminals, each pair of terminals being electrically coupled to a corresponding resistor among the plurality of resistors, such that the change in the resistance of the corresponding resistor is output via the pair of terminals,
- wherein the substrate is attached to a flexure element, the plurality of resistors including two resistors disposed at locations at which the two resistors are opposite to each other, such that the flexure element is interposed between the two resistors,
- wherein the flexure element is cuboidal,
- wherein the pairs of terminals are respectively provided on surfaces of the cuboidal flexure element, the pair of terminals and the resistors provided on different surfaces of the cuboidal flexure element.
5 more elements
A strain gauge comprising:
- a flexible substrate;
- and
- a plurality of resistors each formed of a Cr composite film, on or above the substrate,
- wherein the substrate is attached to a flexure element, the plurality of resistors including:
- two resistors disposed at locations at which the two resistors are opposite to each other, such that the flexure element is interposed between the two resistors;
- and two other resistors disposed at locations at which the two other resistors are opposite to each other, such that the flexure element is interposed between the two other resistors,
- wherein the substrate includes a first region where a first surface of the flexure element is attachable;
- a second region and a third region where a second surface and a third surface of the flexure element that are each adjacent to the first surface of the flexure element and that are opposite to each other are attachable;
- and a fourth region and a fifth region where a fourth surface and a fifth surface of the flexure element that are each adjacent to the first surface of the flexure element and that are opposite to each other are attachable,
- wherein one among the two resistors is disposed with respect to the second region, and another among the two resistors is disposed with respect to the third region, and
- wherein one among the two other resistors is disposed with respect to the fourth region, and another among the two other resistors is disposed with respect to the fifth region.
8 more elements
Dependencies are inferred from the claim text.