Frequency modulation MEMS triaxial gyroscope

A device, comprising:

• a substrate;
• a first mobile mass and a second mobile mass suspended over the substrate;
• a central bridge structure directly connecting the first mobile mass to the second mobile mass:
• first, second, third, and fourth elastic elements;
• a first driving body coupled to the first mobile mass through the first elastic elements;
• a second driving body coupled to the second mobile mass through the second elastic elements, the first and second mobile masses being between the first and second driving bodies;
• a third driving body coupled to the first mobile mass through the third elastic elements;
• a fourth driving body coupled to the second mobile mass through the fourth elastic elements, the first mobile mass being between the third and fourth driving bodies;
• a first and a second driving electrode structure, coupled to the first and second driving bodies, respectively, the first and second driving electrode structures being in the first and second driving bodies, respectively;
• a third and a fourth driving electrode structure, coupled to the third and fourth driving bodies, respectively;
• out-of-plane driving electrode structures in the substrate and the first and second mobile masses being over the out-of-plane driving electrode structures;
• first movement sensing electrodes in the first and second driving bodies;
• second movement sensing electrodes in the third and fourth driving bodies;
• and
• third movement sensing electrodes in the substrate and coupled to the first and second mobile masses, respectively.

A device, comprising:

• a substrate;
• a first mobile mass over the substrate;
• a second mobile mass over the substrate;
• a central bridge structure directly connecting the first mobile mass to the second mobile mass:
• first and second driving bodies, the first and second mobile masses being between the first and second driving bodies;
• third and fourth driving bodies, the first mobile mass being positioned between the third and fourth driving bodies;
• fifth and sixth driving bodies, the second mobile mass being positioned between the fifth and sixth driving bodies;
• and
• first and second driving electrodes in the substrate, the first mobile mass being over the first driving electrode and the second mobile mass being over the second driving electrode.