Seal ring structure
AssigneeUnited Microelectronics Corp.
InventorsHai Biao Yao, Su Xing, Jinyu Liao, Purakh Raj Verma
Life of this patent
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Abstract
The invention provides a seal ring structure, which comprises a substrate, and a seal ring positioned on the substrate, wherein the seal ring comprises an inner seal ring comprising a plurality of inner seal units, wherein each of the inner seal units is arranged at intervals with each other, an outer seal ring comprising a plurality of outer seal units arranged at the periphery of the inner seal ring, wherein each of the outer seal units is arranged at intervals with each other, and a plurality of groups of fence-shaped seal units, wherein at least one group of fence-shaped seal units is positioned between one of the inner seal units and the other adjacent outer seal unit.
Claims14
A seal ring structure comprising:
- a substrate;
- and
- a seal ring located on the substrate, wherein the seal ring comprises:
- an inner seal ring comprising a plurality of inner seal units, wherein each of the inner seal units is arranged at intervals;
- an outer seal ring comprising a plurality of outer seal units arranged at the periphery of the inner seal ring, wherein the outer seal units are arranged at intervals with each other;
- and
- a plurality of groups of fence-shaped seal structures, wherein at least one group of fence-shaped seal structures is located between one of the inner seal units and another adjacent outer seal unit, wherein each group of the fence-shaped seal structures comprises a plurality of first fence-shaped seal structures connected to each inner seal ring unit and a plurality of second fence-shaped seal structures connected to each outer seal ring unit;
- and
- a dicing path, surrounding the seal ring, wherein there is no other elements disposed between the dicing path and the outer seal ring, and wherein at least one of the first fence-shaped seal structure or the second fence-shaped seal structure is exposed to the dicing path.
Dependencies are inferred from the claim text.