Crystal growth apparatus
AssigneeShowa Denko K.K.
InventorShunsuke Noguchi
Life of this patent
Estimating the term…
Abstract
A crystal growth apparatus including: a heat source, a crucible including a container body in which a raw material can be received and a lid part on which a seed crystal can be mounted; a first heat insulating part which is disposed externally of the crucible and in which a first through-hole penetrating in a thickness direction is provided; a second heat insulating part which is disposed externally of the first heat insulating part and in which a second through-hole penetrating in a thickness direction is provided; a moving mechanism configured to move the first heat insulating part and the second heat insulating part relative to each other; and a radiation type temperature measuring unit configured to measure a temperature of the crucible via the first through-hole and the second through-hole.
Claims14
A crystal growth apparatus comprising:
- a heat source;
- a crucible including a container body in which a raw material is to be received and a lid part on which a seed crystal is to be mounted;
- a first heat insulating part which is disposed externally of the crucible and in which at least one first through-hole penetrating in a thickness direction is provided;
- a second heat insulating part which is disposed externally of the first heat insulating part and in which at least one second through-hole penetrating in a thickness direction is provided;
- a moving mechanism configured to move the first heat insulating part and the second heat insulating part relative to each other, and to switch between a state in which the first through-hole and the second through-hole communicate with each other and a state in which the first and second through holes do not communicate with each other;
- and
- a radiation type temperature measuring unit configured to measure a temperature of the crucible via the first through-hole and the second through-hole,
- wherein the first heat insulating part covers an upper surface of the crucible and an outer surface of the crucible from a lower end of the outer surface of the crucible to an upper end of the outer surface of the crucible.
Dependencies are inferred from the claim text.