Plating method and plating apparatus
AssigneeEbara Corporation
InventorsJumpei Fujikata, Masashi Shimoyama, Ryu Miyamoto, Kentaro Ishimoto
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Abstract
A plating method for plating a substrate having resist opening portions is provided. The plating method includes a resist residue removing step of removing resist residues in the resist opening portions of the substrate by spraying first process liquid to a surface of the substrate on which the resist opening portions are formed, a liquid filling step of soaking the substrate passed through the removing step in second process liquid to fill the resist opening portions of the substrate with the second process liquid, and a plating step of plating the substrate passed through the liquid filling step.
Claims12
A plating apparatus for plating a substrate having resist opening portions including:
- a resist residue removing apparatus for removing resist residues in resist opening portions of the substrate, comprising a spray unit having nozzles for spraying a first process liquid to a surface of the substrate on which the resist opening portions are formed;
- a liquid filling apparatus for soaking the substrate in a second process liquid to fill the resist opening portions of the substrate with the second process liquid;
- a plating bath for plating the substrate;
- a controller configured to control the resist residue removing apparatus;
- and
- a moving mechanism for moving at least either one of the spray unit and the substrate so that the spray unit moves relatively along the surface of the substrate,
- wherein the spray unit includes a first nozzle group and a second nozzle group that are spaced from each other in upper and lower positions in a vertical direction, and the first nozzle group and the second nozzle group contain a plurality of nozzles arranged in a horizontal direction, and
- the controller is configured to control the spray unit so that spraying from the first nozzle group and spraying from the second nozzle group are performed on the substrate arranged in the vertical direction at different timings.
Dependencies are inferred from the claim text.