Wet substrate processing device

A wet substrate processing device, having:

• a treatment tank for holding a treatment solution;
• a stirring paddle disposed inside the treatment tank;
• and
• a driving mechanism for driving the stirring paddle, wherein
• the driving mechanism has:
• a rotary motor;
• a central rotating member connected to the rotary motor;
• an outer fixed ring spaced from the central rotating member and surrounding an outside of the central rotating member;
• a planetary member connected to the central rotating member so as to rotate inside the outer fixed ring;
• a driving shaft connected to the planetary member and the stirring paddle and extending in a radial direction of the outer fixed ring;
• and
• a supporting member connected to the planetary member and the driving shaft, wherein
• the driving shaft is configured to reciprocate in a longitudinal direction via the supporting member by rotation of the rotary motor,
• the outer fixed ring has a through hole extending from an outer surface of the outer fixed ring to an inner surface of the outer fixed ring, and
• the through hole of the outer fixed ring is configured to be connectable to a nozzle.