Metal triamine compound, method for preparing the same, and composition for depositing metal-containing thin film including the same

A metal triamine compound represented by the following Chemical Formula 1:

• wherein
• M is M1(A1), M2(A2)(A3), M3(A2)(A3)(A4), M4(═NR′)2 or M4(CO)4;
• M1 is a Group 13 metal or a lanthanide metal;
• M2 is a Group 4 transition metal;
• M3 is a Group 5 transition metal;
• M4 is a Group 6 transition metal;
• R′ is (C1-C7) alkyl;
• R1 to R5 are each independently hydrogen or (C1-C7)alkyl;
• and
• A1 is (C1-C7)alkyl, NR6R7, OR8, a cyclopentadienyl ring or a fused ring containing the cyclopentadienyl ring;
• A2, A3 and A4 are each independently NR6R7, OR8, a cyclopentadienyl ring or a fused ring containing the cyclopentadienyl ring;
• the cyclopentadienyl ring or the fused ring containing the cyclopentadienyl ring in A1, A2, A3 and A4 may be further substituted with (C1-C7)alkyl or (C2-C7)alkenyl;
• R6, R7 and R8 are each independently (C1-C7)alkyl or SiR9R10R11;
• R9 to R11 are each independently (C1-C7)alkyl;
• and
• m is an integer of 0 to 2.