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US 11,447,398 B2Granted
Garnet compound, sintered body and sputtering target containing same
AssigneeIdemitsu Kosan Co., Ltd.
InventorsKazuyoshi Inoue, Shigekazu Tomai, Masatoshi Shibata
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Abstract
A garnet compound represented by a general formula (I): Ln3In2Ga3-XAlXO12 (I) (in the formula, Ln represents one or more metal elements selected from La, Nd, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb and Lu; and X satisfies an expression 0≤X<3).
Claims10
A sputtering target, comprising a oxide sintered body, comprising:
- a garnet phase represented by a general formula (I):
- Ln3In2Ga3-XAlXO12 (I)
- wherein,
- Ln represents one or more metal elements selected from Nd and Sm satisfies an expression 0≤X<3, and
- a bixbyite phase represented by In2O3.
2 more elements
Dependencies are inferred from the claim text.