Method for transferring container
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsYi-Tang Huang, Yuan-Yu Feng, Chia-Han Lin, Chien-Fa Lee
Life of this patent
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Abstract
A method for transferring a container configured to hold at least one article used in semiconductor fabrication is provided. The method includes moving a transferring mechanism to a first position that is adjacent to the original space; producing an image of an edge of the container that is adjacent to the original space using an optical receiver before the container is moved to a destination space; and performing an image analysis of the image to determine whether to move the container to the destination space.
Claims20
A method for transferring a container configured to hold at least one article used in semiconductor fabrication, comprising:
- moving a transferring mechanism to a first position that is adjacent to the original space;
- producing an image of an edge of the container that is adjacent to the original space using an optical receiver before the container is moved to a destination space;
- and
- performing an image analysis of the image to determine whether to move the container to the destination space.
A method for transferring a container configured to hold at least one article used in semiconductor fabrication, comprising:
- producing an first image of an edge of the container at a first position that is adjacent to an original space using an optical receiver;
- moving the container from the first position to a second position that is adjacent to a destination space using a transferring mechanism when the result of an image analysis of the first image is accepted;
- producing an second image of the destination space using the optical receiver;
- and
- performing an image analysis of the second image to determine whether to place the container at the destination space.
A stocker for storing containers, comprising:
- a transferring mechanism, configured to move at least one container from a first position that is adjacent to an original space to a second position that is adjacent to a destination space, wherein the container is configured to hold at least one article used in semiconductor fabrication and the transferring mechanism comprises:
- a robotic arm;
- and
- a blade, positioned on the robotic arm, and configured to place the container at the destination space;
- an optical receiver, positioned at the transferring mechanism, and configured to produce an first image of an edge of the container at the first position, an second image of the destination space, and an third image of the edge of the container that is placed at the destination space;
- an image processor, connected to the optical receiver, and configured to perform an image analysis of the first image, the second image and the third image to determine if abnormality occurs.
Dependencies are inferred from the claim text.