Inkjet apparatus and method for manufacturing functional element using the same

An inkjet apparatus configured to apply an ink containing a material of a functional element on a substrate surface, the inkjet apparatus comprising:

• an inkjet head;
• a scanning mechanism configured to control relative positions of the inkjet head and the substrate surface such that the inkjet head and the substrate surface relatively reciprocate in a main scanning direction and such that the inkjet head and the substrate surface relatively move in a sub-scanning direction in a case in which forward movement and backward movement are switched during the reciprocation;
• a surrounding portion surrounding a predetermined region in which the inkjet head is moved by the scanning mechanism in plan view of the substrate surface, and configured such that the surrounding portion overlaps with a nozzle surface of the inkjet head in side view of the substrate surface;
• and
• a vapor supply portion provided outside the substrate surface and in the region surrounded by the surrounding portion in plan view of the substrate surface and configured to supply a vapor of the same material as a component of a solvent contained in the ink to the region surrounded by the surrounding portion,
• wherein in a case in which the ink to be applied contains a solvent whose vapor has a higher density than that of air, the substrate surface is disposed vertically below the inkjet head and the inkjet head is configured to eject the ink vertically downward, and
• wherein in a case in which the ink to be applied contains a solvent whose vapor has a density lower than that of air, the substrate surface is disposed vertically above the inkjet head and the inkjet head is configured to eject the ink vertically upward.