Laser machining apparatus and laser machining method

A laser machining apparatus comprising:

• a laser oscillator to emit a laser beam:
• a focusing lens to irradiate a workpiece with the laser beam;
• a focus position control mechanism to control a divergence angle of the laser beam and an incident diameter of the laser beam incident on the focusing lens, the focus position control mechanism being disposed between the laser oscillator and the focusing lens and being disposed on an optical path of the laser beam;
• a laser beam deflector to deflect the laser beam before the laser beam is incident on the focusing lens:
• an emitting angle control mechanism to change a distance between the laser beam deflector and the focusing lens by moving the focusing lens along an optical axis of the focusing lens;
• and
• a controller to control, while the laser beam sweeps over the workpiece an irradiation diameter of the laser beam on a surface of the workpiece and a focus position of the laser beam along the optical axis by controlling the focus position control mechanism on a basis of a shape of the workpiece, and
• the controller further controls an exit angle of the laser beam exiting from the focusing lens, wherein the controller is configured to control the emitting angle control mechanism to arrange an entrance pupil position of the focusing lens on a surface of the laser beam deflector.

A laser machining apparatus comprising:

• a laser oscillator to emit a laser beam;
• a focusing lens to irradiate a workpiece with the laser beam;
• a focus position control mechanism to control a divergence angle of the laser beam and an incident diameter of the laser beam incident on the focusing lens, the focus position control mechanism being disposed between the laser oscillator and the focusing lens and being disposed on an optical path of the laser beam;
• a laser beam deflector to deflect the laser beam before the laser beam is incident on the focusing lens;
• an emitting angle control mechanism to change a distance between the laser beam deflector and the focusing lens by moving the focusing lens along an optical axis of the focusing lens;
• and
• a controller to control while the laser beam sweeps over the workpiece, an irradiation diameter of the laser beam on a surface of the workpiece and a focus position of the laser beam along the optical axis by controlling the focus position control mechanism on a basis of a shape of the workpiece, and
• the controller further controls an exit angle of the laser beam exiting from the focusing lens,
• wherein the controller controls the emitting angle control mechanism to control an incident angle of the laser beam on the workpiece.