Gas purge unit and load port apparatus
AssigneeTDK Corporation
InventorsTadamasa Iwamoto, Jun Emoto
Life of this patent
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Abstract
A gas purge unit introduces a cleaning gas into a purge container with an opening therethrough. The gas purge unit includes a first blowout member second blowout member. The first blowout member is disposed along a lateral the opening and includes a first nozzle port. The first nozzle port blows the cleaning gas into the purge container. The second blowout member is disposed along the lateral side and includes a second nozzle port. The second nozzle port is disposed farther from the opening than the first nozzle port and blows the cleaning gas into the purge container. A load port apparatus includes the gas purge unit.
Claims15
A gas purge unit for introducing a cleaning gas into a purge container with an opening therethrough, comprising:
- a first blowout member disposed along a lateral side of the opening and including a first nozzle port configured to blow the cleaning gas into the purge container;
- and
- a second blowout member disposed along the lateral side and including a second nozzle port arranged at a position farther from a center of the purge container than the first nozzle port and configured to blow the cleaning gas into the purge container, wherein
- a blowing angle of a center line of the cleaning gas blown out from the second nozzle port is smaller than a blowing angle of a center line of the cleaning gas blown out from the first nozzle port with respect to the a plane defining the opening.
A gas purge unit for introducing a cleaning gas into a purge container with an opening therethrough, comprising:
- a first nozzle port configured to blow the cleaning gas from at least one lateral side of the opening into the purge container;
- and
- a second nozzle port arranged at a position farther from a center of the purge container than the first nozzle port and configured to blow the cleaning gas into the purge container, wherein
- the first nozzle port and the second nozzle port blow out the cleaning gas into the purge container independently from one another,
- a blowing of angle of a center line of the cleaning gas blown out from the second nozzle port is smaller than a blowing of angle of a center line of the cleaning gas blown out from the first nozzle port with respect to a plane defining the opening.
Dependencies are inferred from the claim text.