Back to results
US 11,446,708 B2Granted
Compositions and methods for reducing interaction between abrasive particles and a cleaning brush
AssigneeEntegris, Inc.
InventorDaniela White
Life of this patent
Estimating the term…
Abstract
Described are methods for removing abrasive particles from a polymeric surface, such as from a polymeric surface of a cleaning brush used in a post chemical-mechanical processing cleaning step, as well as related cleaning solutions.
Claims11
A method of removing abrasive particles from a post-chemical-mechanical-processing (post-CMP) cleaning brush, the method comprising:
- providing a post-CMP cleaning brush having a polymeric surface and having abrasive particle residue at the polymeric surface, the polymeric surface including polymer made from monomer that comprises a vinyl alcohol monomer and the abrasive particle residue comprising abrasive particles having hydrogen bonding groups at surfaces of the particles,
- providing a cleaning solution having a pH in a range from 1 to 4, the cleaning solution comprising:
- cleaning agent and
- particle removal agent, and
- removing the abrasive particle residue from the polymeric surface by contacting the polymeric surface with the cleaning solution.
2 more elements
Dependencies are inferred from the claim text.