Fluid control device
AssigneeMurata Manufacturing Co., Ltd.
InventorsSusumu Takeuchi, Kiyoshi Kurihara
Life of this patent
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AssigneeMurata Manufacturing Co., Ltd.
InventorsSusumu Takeuchi, Kiyoshi Kurihara
Estimating the term…
A fluid control device includes a container and a passive valve. A vacuum source has a suction hole. The container has a first connection hole, a second connection hole, a third connection hole, a storage chamber, and a water-sealing chamber. The passive valve includes a first valve housing, a second valve housing, and a diaphragm. A ventilation hole, a second ventilation hole, and a third ventilation hole are provided in the first valve housing and the second valve housing. The first ventilation hole of the passive valve communicates with the second connection hole of the container. The second ventilation hole of the passive valve communicates with the suction hole of the vacuum source. The third ventilation hole is opened to the atmosphere. The diaphragm is pinched between the first valve housing and the second valve housing and forms a first region and a second region.
A fluid control device comprising:
Dependencies are inferred from the claim text.