# US 11,444,555 B2 · Actuator including elastomer layer and elastic electrodes and method for manufacturing the same

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- Number: US 11,444,555 B2
- Document ID: US11444555B2
- Status: Granted
- Kind: B2
- Application number: 16/472,458
- Filed: 2017-12-29
- Published: 2020-05-21
- Granted: 2022-09-13
- Earliest claimed: 2016-12-29
- Assignees: Sony Corporation
- Applicants: Sony Corporation
- Inventors: Satoshi Nakamaru; Hiroichi Ishikawa; Kentarou Sakai; Akihiro Nakata; Kazuhito Wakana; Yoshio Goto
- Web page: https://patentgrep.com/patent/US11444555B2

## CPC

- H02N 1/006: {of the gap-closing type (H02N1/004 takes precedence)}
- B25J 9/1075: {with muscles or tendons}
- B25J 9/12: electric
- H02N 2/00: Electric machines in general using piezoelectric effect, electrostriction or magnetostriction (generating mechanical vibrations in general B06B; piezoelectric, electrostrictive or magnetostrictive devices in general H10N30/00)
- H02N 2/02: producing linear motion, e.g. actuators; Linear positioners {; Linear motors}
- H04R 19/02: Loudspeakers (H04R19/01 takes precedence)
- H10N 30/05: Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes
- H10N 30/2041: {Beam type}
- H10N 30/206: {using only longitudinal or thickness displacement, e.g. d33 or d31 type devices}
- H10N 30/50: having a stacked or multilayer structure
- H10N 30/506: {having a cylindrical shape and having stacking in the radial direction, e.g. coaxial or spiral type rolls}
- H10N 30/857: Macromolecular compositions
- H10N 30/871: {Single-layered electrodes of multilayer piezoelectric or electrostrictive devices, e.g. internal electrodes}
- H10N 30/878: {the principal material being non-metallic, e.g. oxide or carbon based}
- H10N 30/886: {Additional mechanical prestressing means, e.g. springs}
- H02N 2/10: producing rotary motion, e.g. rotary motors
- H04R 1/323: {for loudspeakers (H04R1/34 and H04R1/40 take precedence)}
- H04R 7/04: Plane diaphragms
- H02N: ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- B25J: MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES ({manipulators specially adapted for use in surgery A61B34/70; manipulators used in cleaning hollow articles B08B9/04}; manipulators associated with rolling mills B21B39/20; manipulators associated with forging machines B21J13/10; {manipulators associated with picking-up and placing mechanisms B23P19/007}; means for holding wheels or parts thereof B60B30/00; {vehicles with ground-engaging propulsion means, e.g. walking members B62D57/02, B62D57/032; devices for picking-up and depositing articles or materials between conveyors B65G47/90, B65G47/91; manipulators with gripping or holding means for transferring packages B65H67/065}; cranes B66C; {manipulators used in the protection or supervision of pipe-line installations F17D5/00; walking equipment adapted for nuclear steam-generators F22B37/006}; manipulators specially adapted for, or associated with, nuclear reactors G21C; {apparatus used for handling wafers during manufacture or treatment of semiconductor H10P72/50})
- H04R: LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS (producing sounds with frequency not determined by supply frequency G10K)
- H10N: ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR

## Abstract

An actuator includes a stack including: an elastomer layer; and an elastic electrode disposed on each surface of the elastomer layer, in which the stack is subjected to a pre-strain of 50% or more at least in one direction. The stack may have a round tubular shape with the elastic electrodes disposed on opposite surfaces of the elastomer layer in a radial direction of the stack.

## Claims

### Claim 1

An actuator comprising:
a stack including:
an elastomer layer; and
an elastic electrode disposed on each surface of the elastomer layer,
wherein the stack is subjected to a pre-strain of 50% or more at least in one direction, and wherein the stack has a round tubular shape with the elastic electrodes disposed on opposite surfaces of the elastomer layer in a radial direction of the stack.

### Claim 2 (depends on 1)

The actuator according to claim 1, wherein
the elastomer layer has a Young's modulus of 10 MPa or less, and
the elastomer layer has a strain at break of 200% or more.

### Claim 3 (depends on 1)

The actuator according to claim 1, wherein
each elastic electrode in a pre-strain-released state has a mean thickness of 500 μm or less, and
each elastic electrode with the stack subjected to a strain of 100% or more has a volume resistivity of 10 Ω·cm or less.

### Claim 4 (depends on 1)

The actuator according to claim 1, wherein each elastic electrode contains at least one of a conductive filler or a conductive polymer.

### Claim 5 (depends on 4)

The actuator according to claim 4, wherein each elastic electrode further contains an elastomer.

### Claim 6 (depends on 4)

The actuator according to claim 4, wherein the conductive filler contains at least one of a carbon-based filler, a metal-based filler, a metal oxide-based filler, or a metal-coated filler.

### Claim 7 (depends on 1)

The actuator according to claim 1, wherein
each elastic electrode contains a conductive filler, and
the conductive filler is carried on a surface of the elastomer layer.

### Claim 8 (depends on 1)

The actuator according to claim 1, wherein each elastic electrode is solid, gel, or liquid.

### Claim 9 (depends on 1)

The actuator according to claim 1, wherein each elastic electrode contains an elastic ion-conductive material and an electrolyte.

### Claim 10 (depends on 1)

The actuator according to claim 1, wherein each elastic electrode contains a polymer suspension and at least one of a conductive filler or a conductive polymer.

### Claim 11 (depends on 1)

The actuator according to claim 1, wherein each elastic electrode and the elastomer layer are stacked alternately and repeatedly.

### Claim 12 (depends on 1)

The actuator according to claim 1, wherein part of each elastic electrode has a Young's modulus exceeding 10 MPa.

### Claim 13 (depends on 1)

The actuator according to claim 1, wherein an interface between the elastomer layer and each elastic electrode undergoes an adhesion improving treatment.

### Claim 14 (depends on 1)

The actuator according to claim 1, further comprising a holding unit that holds the stack,
wherein the holding unit is capable of changing the stack in size.

### Claim 15 (depends on 1)

The actuator according to claim 1, further comprising a holding unit that holds the stack in a pre-strained state.

### Claim 16 (depends on 1)

The actuator according to claim 1, wherein
the stack is subjected to a pre-strain of 50% or more in a direction orthogonal to a driving direction, and
the pre-strain in the direction orthogonal to the driving direction is larger than a pre-strain in the driving direction.

### Claim 17 (depends on 1)

The actuator according to claim 1, wherein
the stack is subjected to a pre-strain of 50% or more in a direction orthogonal to a driving direction and no pre-strain in the driving direction.

### Claim 18 (depends on 1)

The actuator according to claim 1, wherein each elastic electrode contains a carbon-based filler and silicone.

### Claim 19

An actuator comprising:
a stack including:
an elastomer layer; and
an elastic electrode disposed on each surface of the elastomer layer,
wherein the stack is subjected to a pre-strain at least in one direction, and
the elastomer layer has a mean thickness of 3 μm or less, and wherein the stack has a round tubular shape with the elastic electrodes disposed on opposite surfaces of the elastomer layer in a radial direction of the stack.
