# US 11,444,235 B2 · Vibrator device, electronic apparatus, and vehicle > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 11,444,235 B2 - Document ID: US11444235B2 - Status: Granted - Kind: B2 - Application number: 16/811,796 - Filed: 2020-03-06 - Published: 2020-09-10 - Granted: 2022-09-13 - Earliest claimed: 2019-03-08 - Assignees: Seiko Epson Corporation - Applicants: Seiko Epson Corporation - Inventors: Seiichiro Ogura; Ryuta Nishizawa; Keiichi Yamaguchi - Web page: https://patentgrep.com/patent/US11444235B2 ## CPC - G01C 19/5656: the devices involving a micromechanical structure - G01P 3/02: Devices characterised by the use of mechanical means - H10N 30/20: with electrical input and mechanical output, e.g. functioning as actuators or vibrators - H10N 30/302: {Sensors} - H10N 30/304: {Beam type} - H10N 30/87: Electrodes or interconnections, e.g. leads or terminals - H10N 30/88: Mounts; Supports; Enclosures; Casings - H10W 42/20: protecting against electromagnetic or particle radiation, e.g. light, X-rays, gamma-rays or electrons - H10W 70/682: {comprising holes having chips therein} - H10W 72/884: {Die-attach connectors and bond wires} - H10W 90/734: {between a chip and a stacked insulating package substrate, interposer or RDL} - H10W 90/754: {between a chip and a stacked insulating package substrate, interposer or RDL} - G01C: MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY (measuring liquid level G01F; radio navigation, determining distance or velocity by use of propagation effects, e.g. Doppler effects, propagation time, of radio waves, analogous arrangements using other waves G01S) - G01P: MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT (measuring or recording blood flow A61B5/02, A61B8/06; monitoring speed or deceleration of electrically-propelled vehicles B60L3/00; vehicle lighting systems adapted to indicate speed B60Q1/54; determining position or course in navigation, measuring ground distance in geodesy or surveying G01C; combined measuring devices for measuring two or more variables of movement G01C23/00; measuring velocity of sound G01H; measuring velocity of light G01J7/00; measuring direction or velocity of solid objects by reception or emission of radiowaves or other waves and based on propagation effects, e.g. Doppler effect, propagation time, direction of propagation, G01S; measuring speed of nuclear radiation G01T; measuring acceleration of gravity G01V; {measuring or recording the speed of trains B61L23/00; speed indicators incorporated in motor vehicles B60K35/00; measuring frequency or phase G01R; traffic control G08G}) - H10N: ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR - H10W: GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10 ## Abstract The vibrator device includes: a base; a circuit element disposed on the base; a vibrating element disposed to at least partially overlap the circuit element in a plan view; and a support substrate that is disposed between the circuit element and the vibrating element and supports the vibrating element. In addition, the vibrating element has a frequency adjustment portion that performs frequency adjustment by removing at least a part of the vibrating element, and the support substrate includes a base portion that supports the vibrating element, a support portion that supports the base portion, a beam portion that couples the base portion the support portion, and a shielding portion that is connected to the beam portion, overlaps the frequency adjustment portion in a plan view, and has light shielding properties. ## Claims ### Claim 1 A vibrator device comprising: a base; a circuit element disposed on the base; a vibrating element disposed to at least partially overlap the circuit element in a plan view; and a support substrate that is disposed between the circuit element and the vibrating element and supports the vibrating element, wherein vibrating element has a frequency adjustment portion that performs frequency adjustment by removing at least a part of the vibrating element, and the support substrate includes a base portion that supports the vibrating element, a support portion that supports the base portion, a beam portion that couples the base portion and the support portion, and a shielding portion that is connected to the beam portion, overlaps the frequency adjustment portion in a plan view, and has light shielding properties. ### Claim 2 (depends on 1) The vibrator device according to claim 1, wherein the vibrating element includes a vibration substrate and an electrode disposed on the vibration substrate, and the vibration substrate and the support substrate are formed of quartz crystals. ### Claim 3 (depends on 2) The vibrator device according to claim 2, wherein the vibration substrate and the support substrate have the same quartz crystal axis direction. ### Claim 4 (depends on 1) The vibrator device according to claim 1, wherein a metal film is disposed on the shielding portion. ### Claim 5 (depends on 4) The vibrator device according to claim 4, further comprising: a wiring disposed on the support substrate and electrically coupled to the vibrating element, wherein a thickness of the metal film is thicker than a thickness of the wiring. ### Claim 6 (depends on 1) The vibrator device according to claim 1, wherein the support substrate is coupled to the base in the support portion. ### Claim 7 (depends on 1) The vibrator device according to claim 1, wherein the vibrating element is a physical quantity sensor element that detects a physical quantity. ### Claim 8 (depends on 1) An electronic apparatus comprising: the vibrator device according to claim 1; and a signal processing circuit that performs signal processing based on an output signal of the vibrator device. ### Claim 9 (depends on 1) A vehicle comprising: the vibrator device according to claim 1; and a signal processing circuit that performs signal processing based on an output signal of the vibrator device. ### Claim 10 A vibrator device comprising: a base; a circuit element disposed on the base; a vibrating element disposed to at least partially overlap the circuit element in a plan view; and a support substrate that is disposed between the circuit element and the vibrating element and supports the vibrating element, wherein the vibrating element has a frequency adjustment portion that performs frequency adjustment by removing at least a part of the vibrating element, and the support substrate includes a base portion that supports the vibrating element, a support portion that supports the base portion, a beam portion that couples the base portion and the support portion, and a shielding portion that is connected to the base portion, overlaps the frequency adjustment portion in a plan view, and has light shielding properties. ### Claim 11 A vibrator device comprising: a base; a circuit element disposed on the base; a vibrating element disposed to at least partially overlap the circuit element in a plan view; and a support substrate that is disposed between the circuit element and the vibrating element and supports the vibrating element, wherein the vibrating element has a frequency adjustment portion that performs frequency adjustment by removing at least a part of the vibrating element, and the support substrate is formed of quartz crystals and includes a base portion that supports the vibrating element, a support portion that supports the base portion, a beam portion that couples the base portion and the support portion, and a shielding portion that is connected to the support portion, overlaps the frequency adjustment portion in a plan view, and has light shielding properties.