# US 11,444,190 B2 · Electronic device including a high electron mobility transistor including a gate electrode and a gate interconnect and a method of using the same

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- Number: US 11,444,190 B2
- Document ID: US11444190B2
- Status: Granted
- Kind: B2
- Application number: 16/948,517
- Filed: 2020-09-22
- Published: 2021-01-07
- Granted: 2022-09-13
- Earliest claimed: 2019-04-18
- Assignees: Semiconductor Components Industries, LLC
- Applicants: Semiconductor Components Industries, LLC
- Inventors: Abhishek Banerjee; Peter Moens
- Web page: https://patentgrep.com/patent/US11444190B2

## CPC

- H10D 30/475: {having wider bandgap layer formed on top of lower bandgap active layer, e.g. undoped barrier HEMTs such as i-AlGaN/GaN HEMTs}
- H10D 64/118: {Electrodes comprising insulating layers having particular dielectric or electrostatic properties, e.g. having static charges}
- H10D 30/015: {of FETs having heterojunction interface channels or heterojunction gate electrodes, e.g. HEMT}
- H10D 62/343: {Gate regions of field-effect devices having PN junction gates}
- H10D 62/8503: {Nitride Group III-V materials, e.g. AlN or GaN}
- H10D 64/111: {Field plates}
- H10D 64/251: {Source or drain electrodes for field-effect devices}
- H10D 64/411: {for FETs}
- H10D 64/683: {being parallel to the channel plane}
- H10D 64/256: {for lateral devices wherein the source or drain electrodes are recessed in semiconductor bodies (source or drain electrodes of TFTs H10D30/673)}
- H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES

## Abstract

An electronic device can include a HEMT. In an embodiment, a gate electrode, a drain electrode, and an access region including a first portion closer to the gate electrode and a second portion closer to the drain electrode. A lower dielectric film can overlie a portion of the access region, and an upper dielectric region can overlie another portion of the access region. In another embodiment, a dielectric film can have a relatively positive or negative charge and a varying thickness. In a further embodiment, the HEMT can include a gate electrode; a dielectric film overlying the gate electrode and defining openings to the gate electrode, wherein a portion of the dielectric film is disposed between the openings; and a gate interconnect extending into the openings of the dielectric film and contacting the gate electrode and the portion of the dielectric film.

## Claims

### Claim 1

An electronic device comprising a high electron mobility transistor comprising:
a gate electrode;
a dielectric film overlying the gate electrode and defining openings to the gate electrode, wherein a portion of the dielectric film is disposed between the openings; and
a gate interconnect extending into the openings of the dielectric film and contacting the gate electrode and the portion of the dielectric film.

### Claim 2 (depends on 1)

The electronic device of claim 1, further comprising a channel layer and a barrier layer overlying the channel layer, wherein the gate electrode includes a III-N semiconductor material and contacts the channel layer or the barrier layer.

### Claim 3 (depends on 1)

The electronic device of claim 1, wherein the high electron mobility transistor further comprises a drain electrode and a source electrode wherein:
the gate electrode is between the drain electrode and the source electrode, and
the gate interconnect contacts the gate electrode over a region configured to allow a current to flow between the drain electrode and the source electrode when the high electron mobility transistor is in an on-state.

### Claim 4 (depends on 1)

The electronic device of claim 1, a portion of the dielectric film has a shape of a lattice with the openings disposed therein.

### Claim 5 (depends on 1)

The electronic device of claim 1, wherein the high electron mobility transistor further comprises a drain electrode and a source electrode and the openings in the dielectric film include a set of particular openings, wherein the particular openings are closer to each other as compared to:
a first shortest distance between the drain electrode and any of the particular openings; or
a second shortest distance between the source electrode and any of the particular openings.

### Claim 6 (depends on 5)

The electronic device of claim 5, wherein the particular openings are closer to each other as compared to the first shortest distance and the second shortest distance.

### Claim 7 (depends on 1)

The electronic device of claim 1, wherein:
the gate electrode has a top surface, a first sidewall, and a second sidewall,
the top surface and the first sidewall meet at a first corner,
the top surface and the second sidewall meet at a second corner, and
the openings in the dielectric film are spaced apart from the first and second corners.

### Claim 8 (depends on 1)

The electronic device of claim 1, the dielectric film comprises:
a first dielectric film overlying the gate electrode, wherein the first dielectric film includes a first material; and
a second dielectric film overlying the first dielectric film, wherein the second dielectric film includes a second material different from the second material.

### Claim 9 (depends on 8)

The electronic device of claim 8, wherein:
the first dielectric film includes Si3N4, SiOkNl, where k<1, AlN, AlOrNs, where r<s, or another nitrogen-containing dielectric material that provides a negatively charged dielectric film, and
the second dielectric film includes Al2O3, AlOtNu, where t>u, SiO2, HfO2, SiOmNn, where m>n, or another oxygen-containing dielectric material that provides a positively charged dielectric film.

### Claim 10 (depends on 1)

The electronic device of claim 1, further comprising an interlevel dielectric layer, wherein the second dielectric film is disposed between and contacts each of the first dielectric film and the interlevel dielectric layer.

### Claim 11

A method of using an electronic device comprising:
placing a first drain electrode of at a first potential;
placing a first source electrode at a second potential; and
placing a first gate interconnect at a third potential,
wherein:
the first drain electrode, the first source electrode, and a first gate electrode are parts of a first high electron mobility transistor,
a dielectric film overlies the gate electrode and defines openings to the first gate electrode, wherein a portion of the dielectric film is disposed between the openings,
the first gate interconnect extends into the openings of the dielectric film and contacts the first gate electrode and the portion of the dielectric film, and
a difference between the third potential and the second potential is VGS and has a non-zero value.

### Claim 12 (depends on 11)

The method of claim 11, wherein the first high electron mobility transistor is in an off-state and VGS<0 V.

### Claim 13 (depends on 11)

The method of claim 11, wherein the first high electron mobility transistor is in an on-state and VGS>0 V.

### Claim 14 (depends on 11)

The method of claim 11, wherein:
a combination of the openings and portions of the dielectric film between the openings occupies a first area having an areal size,
a second high electron mobility transistor has a second gate interconnect and a second gate electrode, wherein a single contact between the second gate interconnect and the second gate electrode occupies a second area having the areal size, and
a gate current of the first high electron mobility transistor is less than a gate current of the second high electron mobility transistor when the first high electron mobility transistor and the second high electron mobility transistor are at VGS.

### Claim 15 (depends on 14)

The method of claim 14, wherein:
the gate current of the first high electron mobility transistor is measured when the first drain electrode is at the first potential, the first source electrode is the second potential, and the first gate interconnect is at the third potential, and
the gate current of the second high electron mobility transistor is measured when the second drain electrode is at the first potential, the second source electrode is the second potential, and the second gate interconnect is at the third potential.

### Claim 16 (depends on 15)

The method of claim 15, wherein, the first high electron mobility transistor and the second high electron mobility transistor are substantially identical to each other, except for (1) the contacts between the first gate electrode and the first gate interconnect and (2) the single contact between the second gate electrode and the second gate interconnect.

### Claim 17 (depends on 11)

The method of claim 11, wherein a portion of the dielectric film has a shape of a lattice with the openings disposed therein.

### Claim 18 (depends on 11)

The method of claim 11, wherein:
the first gate electrode has a top surface, a first sidewall, and a second sidewall,
the top surface and the first sidewall meet at a first corner,
the top surface and the second sidewall meet at a second corner, and
the openings in the dielectric film are spaced apart from the first and second corners.

### Claim 19 (depends on 11)

The method of claim 11, wherein the dielectric film comprises:
a first dielectric film overlying the first gate electrode, wherein the first dielectric film includes a first material; and
a second dielectric film overlying the first gate electrode, wherein the second dielectric film includes a second material different from the second material.

### Claim 20 (depends on 19)

The method of claim 19, wherein:
the first dielectric film includes Si3N4, SiOkNl, where k<1, AlN, AlOrNs, where r<s, or another nitrogen-containing dielectric material that provides a negatively charged dielectric film, and
the second dielectric film includes Al2O3, AlOtNu, where t>u, SiO2, HfO2, SiO2, Nn, where m>n, or another oxygen-containing dielectric material that provides a positively charged dielectric film.