# US 11,444,189 B2 · Semiconductor device and method for manufacturing the same

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- Number: US 11,444,189 B2
- Document ID: US11444189B2
- Status: Granted
- Kind: B2
- Application number: 17/013,986
- Filed: 2020-09-08
- Published: 2021-06-17
- Granted: 2022-09-13
- Earliest claimed: 2019-12-13
- Assignees: Kabushiki Kaisha Toshiba
- Applicants: Kabushiki Kaisha Toshiba
- Inventors: Jumpei Tajima; Toshiki Hikosaka; Shinya Nunoue
- Web page: https://patentgrep.com/patent/US11444189B2

## CPC

- H10D 30/4732: {using Group III-V semiconductor material}
- H10D 30/015: {of FETs having heterojunction interface channels or heterojunction gate electrodes, e.g. HEMT}
- H10D 30/478: {the 2D charge carrier gas being at least partially not parallel to a main surface of the semiconductor body}
- H10D 62/117: {Shapes of semiconductor bodies}
- H10D 62/824: comprising only Group III-V materials heterojunctions, e.g. GaN/AlGaN heterojunctions
- H10D 62/8503: {Nitride Group III-V materials, e.g. AlN or GaN}
- H10D 62/854: further characterised by the dopants
- H10D 64/256: {for lateral devices wherein the source or drain electrodes are recessed in semiconductor bodies (source or drain electrodes of TFTs H10D30/673)}
- H10D 62/378: {Contact regions to the substrate regions}
- H10D 64/111: {Field plates}
- H10D 64/513: {within recesses in the substrate, e.g. trench gates, groove gates or buried gates}
- H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES

## Abstract

According to one embodiment, a semiconductor device includes first, second, and third electrodes, first, second, and third semiconductor layers, and a first insulating member. The first semiconductor layer includes first, second, third, fourth, and fifth partial regions. A direction from the first partial region toward the second partial region is along a first direction. The first electrode includes a first electrode portion. A direction from the first electrode portion toward the second electrode is along the first direction. A second direction from the third partial region toward the third electrode crosses the first direction. The second semiconductor layer includes a first semiconductor portion and a second semiconductor portion. At least a portion of the first semiconductor layer is between the third and second semiconductor layers. The first insulating member includes a first insulating portion. The first insulating portion is provided between the third partial region and the third electrode.

## Claims

### Claim 1

A semiconductor device, comprising:
a first semiconductor layer including Alx1Ga1-x1N (0≤x1<1), the first semiconductor layer including a first partial region, a second partial region, a third partial region, a fourth partial region, and a fifth partial region, a direction from the first partial region toward the second partial region being along a first direction, a position in the first direction of the third partial region being between a position in the first direction of the first partial region and a position in the first direction of the second partial region, a position in the first direction of the fourth partial region being between the position in the first direction of the first partial region and the position in the first direction of the third partial region, a position in the first direction of the fifth partial region being between the position in the first direction of the third partial region and the position in the first direction of the second partial region;
a first electrode including a first electrode portion;
a second electrode, a direction from the first electrode portion toward the second electrode being along the first direction;
a third electrode, a position of the third electrode in the first direction being between a position of the first electrode portion in the first direction and a position of the second electrode in the first direction, a second direction from the third partial region toward the third electrode crossing the first direction;
a second semiconductor layer including Alx2Ga1-x2N (0<x2≤1 and x1<x2), the second semiconductor layer including a first semiconductor portion and a second semiconductor portion, a direction from the fourth partial region toward the first semiconductor portion being along the second direction, a direction from the fifth partial region toward the second semiconductor portion being along the second direction;
a third semiconductor layer including magnesium and Alx3Ga1-x3N (0<x3<1 and x1<x3), at least a portion of the first semiconductor layer being between the third semiconductor layer and the second semiconductor layer; and
a first insulating member including a first insulating portion, the first insulating portion being provided between the third partial region and the third electrode.

### Claim 2 (depends on 1)

The device according to claim 1, further comprising:
a fourth semiconductor layer including Alx4Ga1-x4N (0<x4<1 and x1<x4),
the third semiconductor layer being between the fourth semiconductor layer and the second semiconductor layer in the second direction,
the first semiconductor layer being between the third semiconductor layer and the second semiconductor layer in the second direction,
the fourth semiconductor layer including a first semiconductor region and a second semiconductor region,
the second semiconductor region being between the first semiconductor region and the third semiconductor layer,
a composition ratio of Al in the first semiconductor region being greater than a composition ratio of Al in the second semiconductor region.

### Claim 3 (depends on 1)

The device according to claim 1, further comprising:
a fourth semiconductor layer including Alx4Ga1-x4N (0<x4<1 and x1<x4),
the third semiconductor layer being between the fourth semiconductor layer and the second semiconductor layer in the second direction,
the first semiconductor layer being between the third semiconductor layer and the second semiconductor layer in the second direction,
a composition ratio of Al in the fourth semiconductor layer decreasing in an orientation from the fourth semiconductor layer toward the third semiconductor layer.

### Claim 4 (depends on 2)

The device according to claim 2, wherein
a composition ratio of Al in the third semiconductor layer is not more than a minimum value of the composition ratio of Al in the fourth semiconductor layer.

### Claim 5 (depends on 4)

The device according to claim 4, wherein
the minimum value of the composition ratio of Al in the fourth semiconductor layer is not less than 0.15 and not more than 0.4.

### Claim 6 (depends on 2)

The device according to claim 2, wherein
a maximum value of the composition ratio of Al in the fourth semiconductor layer is greater than 0.4 and not more than 0.8.

### Claim 7 (depends on 1)

The device according to claim 1, further comprising:
a fourth semiconductor layer including magnesium and Alx4Ga1-x4N (0≤x4<1 and x4<x3),
the third semiconductor layer being between the fourth semiconductor layer and the second semiconductor layer in the second direction,
the first semiconductor layer being between the third semiconductor layer and the second semiconductor layer in the second direction,
a concentration of magnesium in the fourth semiconductor layer being greater than a concentration of magnesium in the third semiconductor layer.

### Claim 8 (depends on 7)

The device according to claim 7, wherein
the concentration of magnesium in the third semiconductor layer is less than 2×1018 cm−3, and
the concentration of magnesium in the fourth semiconductor layer is 2×1018 cm−3 or more.

### Claim 9 (depends on 7)

The device according to claim 7, wherein
an average value of the magnesium concentration in the third semiconductor layer is not more than 1/10 of an average value of the magnesium concentration in the fourth semiconductor layer.

### Claim 10 (depends on 1)

The device according to claim 1, wherein
a concentration of carbon in the third semiconductor layer is less than a concentration of carbon in the first semiconductor layer.

### Claim 11 (depends on 1)

The device according to claim 1, wherein
the fourth partial region is between the third semiconductor layer and the first semiconductor portion in the second direction,
the third partial region is between the third semiconductor layer and the third electrode in the second direction, and
a direction from the third semiconductor layer toward the second partial region is along the first direction.

### Claim 12 (depends on 1)

The device according to claim 1, further comprising:
a conductive member,
the conductive member contacting the third semiconductor layer and the first electrode portion.

### Claim 13 (depends on 12)

The device according to claim 12, wherein
the conductive member includes at least one selected from the group consisting of Ni, Pd, Ag, and Au.

### Claim 14 (depends on 12)

The device according to claim 12, wherein
the first electrode portion includes at least one selected from the group consisting of Ti and Al.

### Claim 15 (depends on 1)

The device according to claim 1, wherein
a direction from the first semiconductor portion toward at least a portion of the first insulating portion is along the first direction.