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US 11,444,148 B2Granted
Recoiled metal thin film for 3D inductor with tunable core
AssigneeIntel Corporation
InventorsGwang-Soo Kim, Aaron D. Lilak, Kumhyo Byon, Doug Ingerly
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Abstract
An inductor is disclosed. The inductor includes a vertically coiled conductor, a metal contact coupled to a first end of the vertically coiled conductor, and a dielectric material coupled to the metal contact. A tunable high permittivity component is coupled to a second end of the vertically coiled conductor.
Claims14
An inductor, comprising:
- a vertically coiled conductor;
- a metal contact coupled to a first end of the vertically coiled conductor;
- a dielectric material coupled to the metal contact;
- and
- a tunable high permittivity component coupled to a second end of the vertically coiled conductor.
2 more elements
A semiconductor structure, comprising:
- a substrate;
- a plurality of inductors coupled to the substrate, including:
- a vertically coiled conductor;
- a metal contact coupled to a first end of the vertically coiled conductor;
- a dielectric material coupled to the metal contact;
- and
- a tunable high permittivity component coupled to a second end of the vertically coiled conductor.
4 more elements
Dependencies are inferred from the claim text.