# US 11,444,140 B2 · Display apparatus and method of manufacturing the same

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- Number: US 11,444,140 B2
- Document ID: US11444140B2
- Status: Granted
- Kind: B2
- Application number: 16/991,492
- Filed: 2020-08-12
- Published: 2021-03-04
- Granted: 2022-09-13
- Earliest claimed: 2019-09-04
- Assignees: Samsung Display Co., Ltd.
- Applicants: Samsung Display Co., Ltd.
- Inventors: Junghan Seo; Wooyong Sung; Wooyoung Kim; Seungyong Song; Sunghoon Yang; Kwanhyuck Yoon; Seunggun Chae; Wonwoo Choi
- Web page: https://patentgrep.com/patent/US11444140B2

## CPC

- H10K 59/88: Dummy elements, i.e. elements having non-functional features
- H10K 59/122: Pixel-defining structures or layers, e.g. banks
- H10K 59/124: Insulating layers formed between TFT elements and OLED elements
- H10K 59/131: Interconnections, e.g. wiring lines or terminals
- H10K 59/8731: {multilayered coatings having a repetitive structure, e.g. having multiple organic-inorganic bilayers}
- H10K 71/231: {by etching of existing layers}
- H10K 59/1201: {Manufacture or treatment}
- H10K 59/8723: {Vertical spacers, e.g. arranged between the sealing arrangement and the OLED}
- H10K 2102/00: Constructional details relating to the organic devices covered by this subclass
- H10K: ORGANIC ELECTRIC SOLID-STATE DEVICES

## Abstract

A display apparatus includes a substrate, a display area disposed on the substrate and including a plurality of pixels, a first planarization layer disposed on the substrate, a second planarization layer disposed on the first planarization layer, a pixel-defining layer disposed on the second planarization layer and covering at least one edge of a first electrode of each of the plurality of pixels, a plurality of first holes disposed between the plurality of pixels and spaced apart from the first electrode, and a first etching prevention layer disposed on a bottom surface of each of the first holes and on the first planarization layer. Each of the first holes includes an opening that passes through the second planarization layer and the pixel-defining layer.

## Claims

### Claim 1

A display apparatus, comprising:
a substrate;
a display area disposed on the substrate and comprising a plurality of pixels;
a first planarization layer disposed on the substrate;
a second planarization layer disposed on the first planarization layer;
a pixel-defining layer disposed on the second planarization layer and covering at least one edge of a first electrode of each of the plurality of pixels;
a plurality of first holes disposed between the plurality of pixels and spaced apart from the first electrode,
wherein each of the first holes comprises an opening that passes through the second planarization layer and the pixel-defining layer; and
a first etching prevention layer disposed on a bottom surface of each of the first holes and on the first planarization layer.

### Claim 2 (depends on 1)

The display apparatus of claim 1, wherein
a first width of the opening formed in the pixel-defining layer is less than a second width of the opening formed in the second planarization layer at a boundary surface between the pixel-defining layer and the second planarization layer.

### Claim 3 (depends on 2)

The display apparatus of claim 2, further comprising:
a second etching prevention layer disposed between the second planarization layer and the pixel-defining layer.

### Claim 4 (depends on 3)

The display apparatus of claim 3, further comprising:
a third etching prevention layer disposed on the second etching prevention layer.

### Claim 5 (depends on 1)

The display apparatus of claim 1, wherein
each of the pixels comprises an intermediate layer disposed on the first electrode, and a second electrode disposed on the intermediate layer, and
the intermediate layer comprises an emission layer, and the intermediate layer and the second electrode are disposed inside each of the first holes.

### Claim 6 (depends on 5)

The display apparatus of claim 5, wherein
the emission layer is disposed on the first electrode and is not disposed inside each of the first holes.

### Claim 7 (depends on 5)

The display apparatus of claim 5, further comprising:
a thin-film encapsulation layer encapsulating the plurality of pixels, wherein
the thin-film encapsulation layer comprises a first inorganic encapsulation layer, a second inorganic encapsulation layer, and an organic encapsulation layer disposed between the first inorganic encapsulation layer and the second inorganic encapsulation layer,
the first inorganic encapsulation layer covers an entirety of the second electrode inside each of the first holes and inner surfaces of each of the first holes, and
an entirety of each of the first holes is filled by the organic encapsulation layer.

### Claim 8 (depends on 7)

The display apparatus of claim 7, further comprising:
a thin-film transistor disposed between the substrate and the first planarization layer; and
a connection line disposed between the first planarization layer and the second planarization layer, and connecting the thin-film transistor to the first electrode, wherein
the connection line comprises a same material as the first etching prevention layer.

### Claim 9 (depends on 7)

The display apparatus of claim 7, further comprising:
a plurality of second holes that pass through the second planarization layer and the pixel-defining layer in a non-display area disposed outside the display area; and
a second etching prevention layer disposed on a bottom surface of each of the second holes and the first planarization layer,
wherein the first planarization layer, the second planarization layer, and the pixel-defining layer extend into the non-display area.

### Claim 10 (depends on 9)

The display apparatus of claim 9, wherein
the intermediate layer and the second electrode extend into the non-display area, and
the intermediate layer and the second electrode are disposed inside each of the second holes.

### Claim 11 (depends on 10)

The display apparatus of claim 10, wherein
the first inorganic encapsulation layer, the organic encapsulation layer, and the second inorganic encapsulation layer extend into the non-display area,
the first inorganic encapsulation layer covers an entirety of the second electrode inside each of the second holes and inner surfaces of each of the second holes, and
an entirety of each of the second holes is filled by the organic encapsulation layer.

### Claim 12 (depends on 10)

The display apparatus of claim 10, further comprising:
a power supply voltage line disposed in the non-display area and surrounding a part of the display area,
wherein the second electrode that extends into the non-display area is electrically connected to the power supply voltage line.

### Claim 13 (depends on 12)

The display apparatus of claim 12, further comprising:
a first dam part and a second dam part disposed outside the display area, wherein
the first dam part and the second dam part each comprise layers including a same material as the second planarization layer and the pixel-defining layer, and
the second dam part clads ends of the power supply voltage line.

### Claim 14 (depends on 1)

The display apparatus of claim 1, further comprising:
a second etching prevention layer disposed between the second planarization layer and the pixel-defining layer.

### Claim 15 (depends on 1)

The display apparatus of claim 1, wherein
a first width of the opening formed in the pixel-defining layer and a second width of the opening formed in the second planarization layer are about equal to each other at a boundary surface between the pixel-defining layer and the second planarization layer.

### Claim 16

A display apparatus, comprising:
a substrate;
a display area disposed on the substrate and comprising a plurality of pixels,
wherein each of the plurality of pixels comprises a first electrode, a second electrode, and an intermediate layer disposed between the first electrode and the second electrode,
wherein the intermediate layer comprises an emission layer;
a thin-film encapsulation layer encapsulating the plurality of pixels, and comprising a first inorganic encapsulation layer, a second inorganic encapsulation layer, and an organic encapsulation layer disposed between the first inorganic encapsulation layer and the second inorganic encapsulation layer;
a non-display area disposed outside the display area;
a first planarization layer extending from the display area into the non-display area and disposed between the substrate and the first electrode;
a second planarization layer extending from the display area into the non-display area and disposed on the first planarization layer;
a pixel-defining layer covering at least one edge of the first electrode, extending from the display area into the non-display area, and disposed on the second planarization layer;
a plurality of holes disposed in the non-display area,
wherein each of the holes comprises an opening that passes through the second planarization layer and the pixel-defining layer; and
a first etching prevention layer disposed on the first planarization layer under the holes, wherein
the intermediate layer and the second electrode extend into the non-display area and are disposed inside each of the holes,
the first inorganic encapsulation layer extends into the non-display area and covers an entirety of the second electrode inside each of the holes and inner surfaces of each of the holes, and
an entirety of each of the holes is filled by the organic encapsulation layer.

### Claim 17 (depends on 16)

The display apparatus of claim 16, further comprising:
a first dam part and a second dam part each comprising at least one layer comprising a same material as the second planarization layer and the pixel-defining layer, wherein
the first inorganic encapsulation layer extends from the holes and covers the first dam part and the second dam part, and is in direct contact with the second inorganic encapsulation layer outside the second dam part.

### Claim 18

A method of manufacturing a display apparatus, the method comprising:
forming a first planarization layer on a substrate;
forming a first etching prevention layer on the first planarization layer;
forming a second planarization layer on the first etching prevention layer;
forming a pixel-defining layer on the second planarization layer; and
forming a plurality of first holes that pass through the second planarization layer and the pixel-defining layer in a display area, wherein
the display area is disposed on the substrate and comprises a plurality of pixels,
each of the pixels comprises a first electrode, a second electrode, and an intermediate layer comprising an emission layer and disposed between the first electrode and the second electrode,
the display apparatus comprises a thin-film encapsulation layer encapsulating the display area and comprising a first inorganic encapsulation layer, a second inorganic encapsulation layer, and an organic encapsulation layer disposed between the first inorganic encapsulation layer and the second inorganic encapsulation layer,
the intermediate layer and the second electrode are formed on a top surface of the first etching prevention layer and a top surface of the pixel-defining layer, and
the first inorganic encapsulation layer covers an entirety of the second electrode inside each of the first holes and inner surfaces of each of the first holes, and an entirety of each of the first holes is filled by the organic encapsulation layer.

### Claim 19 (depends on 18)

The method of claim 18, further comprising:
forming a first contact hole in the pixel-defining layer; and
forming a barrier layer on the pixel-defining layer, wherein
the barrier layer surrounds the first contact hole, and
the first holes are formed by dry etching the second planarization layer and the pixel-defining layer.

### Claim 20 (depends on 19)

The method of claim 19, further comprising:
removing the barrier layer by wet etching after the first holes are formed.

### Claim 21 (depends on 19)

The method of claim 19, further comprising:
forming a second etching prevention layer between the second planarization layer and the pixel-defining layer.

### Claim 22 (depends on 21)

The method of claim 21, wherein
the second etching prevention layer is formed simultaneously with the first electrode.

### Claim 23 (depends on 22)

The method of claim 22, further comprising:
forming a third etching prevention layer on the second etching prevention layer.

### Claim 24 (depends on 18)

The method of claim 18, further comprising:
forming a plurality of second holes that pass through the second planarization layer and the pixel-defining layer; and
forming a second etching prevention layer on a bottom surface of each of the second holes and on the first planarization layer,
wherein the first planarization layer, the second planarization layer, and the pixel-defining layer extend into a non-display area disposed outside the display area.

### Claim 25 (depends on 24)

The method of claim 24, wherein
the intermediate layer and the second electrode are formed on a top surface of the second etching prevention layer and a top surface of the pixel-defining layer, and
the first inorganic encapsulation layer covers an entirety of the second electrode inside each of the second holes and inner surfaces of each of the second holes, and an entirety of each of the second holes is filled by the organic encapsulation layer.

### Claim 26 (depends on 18)

The method of claim 18, wherein
the first holes are formed by irradiating a location corresponding to the first etching prevention layer with a laser.