# US 11,444,107 B2 · Manufacturing method of display panel > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 11,444,107 B2 - Document ID: US11444107B2 - Status: Granted - Kind: B2 - Application number: 17/037,666 - Filed: 2020-09-30 - Published: 2021-01-14 - Granted: 2022-09-13 - Earliest claimed: 2018-04-18 - Assignees: Au Optronics Corporation - Applicants: Au Optronics Corporation - Inventors: Peng-Bo Xi; Chun-Cheng Cheng - Web page: https://patentgrep.com/patent/US11444107B2 ## CPC - H10D 86/0231: {using masks, e.g. half-tone masks} - H10D 86/411: {characterised by materials, geometry or structure of the substrates} - H10D 86/441: {Interconnections, e.g. scanning lines} - H10D 86/60: wherein the TFTs are in active matrices - H10W 46/00: Marks applied to devices, e.g. for alignment or identification - H10W 90/00: Package configurations - H10W 46/301: {for alignment} - H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES - H10W: GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10 ## Abstract A manufacturing method of a display panel includes providing a substrate having a first surface and a second surface opposite to the first surface; forming a high-shielding position layer on the first surface, wherein the light-shielding positioning layer has at least one first alignment pattern; forming a transparent material layer on the second surface; forming a photoresist layer on the transparent material layer; performing an exposure process, such that a light beam passes through the at least one first alignment pattern to penetrate through the substrate and the transparent material layer to the photoresist layer; performing a developing process to pattern the photoresist layer and form a patterned photoresist layer; and performing an etching process to pattern the transparent positioning layer having at least one second alignment pattern. In a direction perpendicular to the substrate, at least one first alignment pattern overlaps with at least one second alignment pattern. ## Claims ### Claim 1 A manufacturing method of a display panel, comprising: providing a substrate having a first surface and a second surface opposite to the first surface; forming a light-shielding positioning layer on the first surface, wherein the light-shielding positioning layer has at least one first alignment pattern; forming a transparent material layer on the second surface; forming a photoresist layer on the transparent material layer; performing an exposure process, such that a light beam passes through the at least one first alignment pattern to penetrate through the substrate and the transparent material layer to the photoresist layer; performing a developing process to pattern the photoresist layer and form a patterned photoresist layer; and performing an etching process to pattern the transparent material layer using the patterned photoresist layer as a mask to form a transparent positioning layer having at least one second alignment pattern, wherein in a direction perpendicular to the substrate, the at least one first alignment pattern overlaps with the at least one second alignment pattern. ### Claim 2 (depends on 1) The manufacturing method of the display panel according to claim 1, wherein before the step of forming the transparent material layer, further comprising: forming a first insulation layer on the first surface; and forming a plurality of pixel units on the first insulation layer, and the step of forming each of the pixel units comprising: forming an element layer on the first insulation layer; forming a second insulation layer on the element layer; and forming a plurality of conductive lines on the second insulation layer, the conductive lines being electrically connected to the element layer, wherein the substrate has a display region and a peripheral region surrounding the display region, the display region comprises a plurality of element areas, a conductive line area and at least one alignment pattern area, the element areas and the at least one alignment pattern area are separated from each other, and the conductive line area surrounds the element areas and the at least one alignment pattern area, wherein the pixel units are located in the display region, wherein the at least one first alignment pattern is disposed corresponding to the at least one alignment pattern area or the peripheral region. ### Claim 3 (depends on 2) The manufacturing method of the display panel according to claim 2, wherein the at least one first alignment pattern is plural, and the first alignment patterns are disposed corresponding to the at least one alignment pattern area and the peripheral region. ### Claim 4 (depends on 2) The manufacturing method of the display panel according to claim 2, wherein before the step of forming the first insulation layer, comprising: forming a light-shielding material layer on the first surface; and patterning the light-shielding material layer to form the light-shielding positioning layer having at least one first alignment pattern. ### Claim 5 (depends on 2) The manufacturing method of the display panel according to claim 2, wherein after the step of forming the first insulation layer, comprising: forming a light-shielding material layer on the first insulation layer; and patterning the light-shielding material layer to form the light-shielding positioning layer. ### Claim 6 (depends on 2) The manufacturing method of the display panel according to claim 2, wherein after the step of forming the second insulation layer, comprising: forming a light-shielding material layer on the second insulation layer; and patterning the light-shielding material layer to form the light-shielding positioning layer. ### Claim 7 (depends on 2) The manufacturing method of the display panel according to claim 2, further comprising: forming at least one first pad on the element layer, the at least one first pad being electrically connected to the element layer; and forming a protection layer on the conductive lines and the at least one first pad, wherein the display region of the substrate further comprises at least one pad region, the at least one pad region and the at least one alignment pattern area are separated from each other, and the at least one first pad is disposed corresponding to the at least one pad region. ### Claim 8 (depends on 7) The manufacturing method of the display panel according to claim 7, wherein after the step of forming the transparent positioning layer, further comprising: performing an alignment process through the at least one second alignment pattern and forming at least one second pad on the transparent positioning layer, wherein the at least one second pad is disposed corresponding to the at least one pad region, and in the direction perpendicular to the substrate, the at least one second pad overlaps with the at least one first pad. ### Claim 9 (depends on 8) The manufacturing method of the display panel according to claim 8, wherein after the step of forming at least one second pad, further comprising: performing a cutting process along a predetermined cutting line; and forming at least one connection structure, the at least one connection structure electrically connecting the at least one first pad to the at least one second pad, wherein in the direction perpendicular to the substrate, the predetermined cutting line is located within the display region, and the element areas, the at least one pad region and the at least one alignment pattern area are located within a region surrounding the predetermined cutting line. ### Claim 10 (depends on 9) The manufacturing method of the display panel according to claim 9, further comprising: before the step of forming the transparent material layer, forming a protection layer on the first surface, and the protection layer covering the pixel units and the substrate; and before the step of forming the at least one connection structure, removing the protection layer. ### Claim 11 (depends on 2) The manufacturing method of the display panel according to claim 2, wherein the step of forming each of the pixel units, further comprising: disposing a light-emitting element on the conductive lines, the light-emitting element corresponding to one of the element areas, and the light-emitting element being electrically connected to the element layer. ### Claim 12 (depends on 1) The manufacturing method of the display panel according to claim 1, wherein a material of the photoresist layer comprises a positive photoresist or a negative photoresist.