# US 11,443,992 B2 · Pressure sensors on flexible substrates for stress decoupling > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 11,443,992 B2 - Document ID: US11443992B2 - Status: Granted - Kind: B2 - Application number: 17/143,332 - Filed: 2021-01-07 - Published: 2021-05-06 - Granted: 2022-09-13 - Earliest claimed: 2019-03-06 - Assignees: Infineon Technologies AG - Applicants: Infineon Technologies AG - Inventors: Dirk Hammerschmidt - Web page: https://patentgrep.com/patent/US11443992B2 ## CPC - H10W 74/124: {the encapsulations having cavities other than that occupied by chips} - H10W 76/15: Containers comprising an insulating or insulated base - B81B 7/0048: {between the MEMS die and the substrate} - B81B 7/0054: {between other parts not provided for in B81B7/0048 - B81B7/0051} - B81B 2201/0264: Pressure sensors - B81B 2207/07: Interconnects - H10W 70/68: Shapes or dispositions thereof - H10W 70/688: {Flexible insulating substrates} - H10W 72/07251: {characterised by changes in properties of the bump connectors during connecting} - H10W 72/20: Bump connectors, e.g. solder bumps or copper pillars; Dummy bumps; Thermal bumps - H10W: GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10 - B81B: MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES (piezoelectric, electrostrictive or magnetostrictive elements per se H10N30/00, H10N35/00) ## Abstract A semiconductor device includes a semiconductor chip including a substrate and a MEMS element, wherein the substrate includes a surface, and wherein the MEMS element is disposed at the surface of the substrate and the MEMS element includes a sensitive area; a first electrical interconnect structure electrically connected to the surface of the substrate; a carrier electrically connected to the first electrical interconnect structure; and a first stress relieve spring entrenched in the carrier, wherein the first stress relieve spring is a single integral channel that comprises two parallel channels that join together at a periphery of the first electrical interconnect structure to form the single integral channel that wraps around a portion of the periphery of the first electrical interconnect structure, wherein the two parallel channels extend outward, in parallel, from the periphery of the first electrical interconnect structure to a first termination region of the carrier. ## Claims ### Claim 1 A semiconductor device, comprising: a semiconductor chip comprising a substrate and a microelectromechanical system (MEMS) element, wherein the substrate includes a first surface and a second surface arranged opposite to the first surface, and wherein the MEMS element is disposed at the first surface of the substrate and the MEMS element includes a sensitive area; a first electrical interconnect structure electrically connected to the first surface of the substrate; a carrier electrically connected to the first electrical interconnect structure; and a first stress relieve spring entrenched in the carrier, wherein the first stress relieve spring is a single integral channel that comprises two parallel channels that join together at a periphery of the first electrical interconnect structure to form the single integral channel that wraps around a portion of the periphery of the first electrical interconnect structure, wherein the two parallel channels extend outward, in parallel, from the periphery of the first electrical interconnect structure to a first termination region of the carrier. ### Claim 2 (depends on 1) The semiconductor device of claim 1, wherein: the substrate of the semiconductor chip is rectangular, the first electrical interconnect structure is electrically connected at a first corner region of the first surface of the substrate, and the two parallel channels extend, in parallel, outward from the periphery of the first electrical interconnect structure such that they wrap around two adjacent sides of the substrate and terminate at the first termination region that is located cattycorner from the first electrical interconnect structure. ### Claim 3 (depends on 1) The semiconductor device of claim 1, wherein: the substrate of the semiconductor chip is rectangular, the two parallel channels extend, in parallel, outward from the periphery of the first electrical interconnect structure to the first termination region of the carrier located at a first periphery region of the carrier, wherein the first periphery region of the carrier is located cattycorner to the first electrical interconnect structure. ### Claim 4 (depends on 1) The semiconductor device of claim 1, wherein the MEMS element is interposed along a diagonal that extends between the first termination region and the first electrical interconnect structure. ### Claim 5 (depends on 1) The semiconductor device of claim 1, wherein the single integral channel of the first stress relieve spring extends entirely through a thickness dimension of the carrier. ### Claim 6 (depends on 1) The semiconductor device of claim 1, wherein the first termination region of the carrier is located at a first periphery region of the carrier. ### Claim 7 (depends on 1) The semiconductor device of claim 1, wherein the first electrical interconnect structure is a bonding ball. ### Claim 8 (depends on 1) The semiconductor device of claim 1, wherein the carrier is a printed circuit board. ### Claim 9 (depends on 1) The semiconductor device of claim 1, wherein: the MEMS element is a pressure sensor and the sensitive area is a pressure sensitive membrane that is separated from the carrier by a gap, and the semiconductor device further comprising a flexible protective material that extends from the carrier to the pressure sensitive membrane, thereby filling the gap between the pressure sensitive membrane and the carrier such that the pressure sensitive membrane is encapsulated by the flexible protective material. ### Claim 10 (depends on 9) The semiconductor device of claim 9, wherein: the flexible protective material is configured to receive applied pressure and transfer the received applied pressure therethrough to the pressure sensitive membrane unchanged. ### Claim 11 (depends on 1) The semiconductor device of claim 1, wherein the single integral channel partially encircles a first contact area of the carrier at which the first electrical interconnect structure is electrically connected thereto. ### Claim 12 (depends on 11) The semiconductor device of claim 11, wherein a portion of the single integral channel that partially encircles the first contact area of the carrier is concentric with the first electrical interconnect structure. ### Claim 13 (depends on 1) The semiconductor device of claim 1, further comprising: a second electrical interconnect structure electrically connected to the first surface of the substrate and to the carrier; and a second stress relieve spring entrenched in the carrier, wherein the second stress relieve spring is a single integral channel that comprises two parallel channels that join together at a periphery of the second electrical interconnect structure to form the single integral channel that wraps around a portion of the periphery of the second electrical interconnect structure, wherein the two parallel channels extend outward, in parallel, from the periphery of the second electrical interconnect structure to a second termination region of the carrier. ### Claim 14 (depends on 13) The semiconductor device of claim 13, wherein a portion of the two parallel channels of the first stress relieve spring are parallel with a portion of the two parallel channels of the second stress relieve spring. ### Claim 15 (depends on 13) The semiconductor device of claim 13, wherein: the first electrical interconnect structure is electrically connected at a first corner region of the first surface of the substrate and the two parallel channels of the first stress relieve spring extend, in parallel, outward from the periphery of the first electrical interconnect structure such that they wrap around a first two adjacent sides of the substrate and terminate at the first termination region that is located cattycorner from the first electrical interconnect structure, and the second electrical interconnect structure is electrically connected at a second corner region of the first surface of the substrate and the two parallel channels of the second stress relieve spring extend, in parallel, outward from the periphery of the second electrical interconnect structure such that they wrap around a second two adjacent sides of the substrate and terminate at the second termination region that is located cattycorner from the second electrical interconnect structure. ### Claim 16 (depends on 15) The semiconductor device of claim 15, wherein the MEMS element is interposed along a first diagonal that extends between the first termination region and the first electrical interconnect structure and is interposed along a second diagonal that extends between the second termination region and the second electrical interconnect structure. ### Claim 17 (depends on 16) The semiconductor device of claim 16, wherein the first diagonal and the second diagonal extend diagonally across the semiconductor chip. ### Claim 18 (depends on 13) The semiconductor device of claim 13, further comprising: a third electrical interconnect structure electrically connected to the first surface of the substrate and to the carrier; and a third stress relieve spring entrenched in the carrier, wherein the third stress relieve spring is a single integral channel that comprises two parallel channels that join together at a periphery of the third electrical interconnect structure to form the single integral channel that wraps around a portion of the periphery of the third electrical interconnect structure, wherein the two parallel channels extend outward, in parallel, from the periphery of the third electrical interconnect structure to a third termination region of the carrier. ### Claim 19 (depends on 18) The semiconductor device of claim 18, further comprising: a fourth electrical interconnect structure electrically connected to the first surface of the substrate and to the carrier; and a fourth stress relieve spring entrenched in the carrier, wherein the fourth stress relieve spring is a single integral channel that comprises two parallel channels that join together at a periphery of the fourth electrical interconnect structure to form the single integral channel that wraps around a portion of the periphery of the fourth electrical interconnect structure, wherein the two parallel channels extend outward, in parallel, from the periphery of the fourth electrical interconnect structure to a fourth termination region of the carrier. ### Claim 20 (depends on 19) The semiconductor device of claim 19, wherein: the first electrical interconnect structure is electrically connected at a first corner region of the first surface of the substrate and the two parallel channels of the first stress relieve spring extend, in parallel, outward from the periphery of the first electrical interconnect structure such that they wrap around a first two adjacent sides of the substrate and terminate at the first termination region that is located cattycorner from the first electrical interconnect structure, the second electrical interconnect structure is electrically connected at a second corner region of the first surface of the substrate and the two parallel channels of the second stress relieve spring extend, in parallel, outward from the periphery of the second electrical interconnect structure such that they wrap around a second two adjacent sides of the substrate and terminate at the second termination region that is located cattycorner from the second electrical interconnect structure, the third electrical interconnect structure is electrically connected at a third corner region of the first surface of the substrate and the two parallel channels of the third stress relieve spring extend, in parallel, outward from the periphery of the third electrical interconnect structure such that they wrap around a third two adjacent sides of the substrate and terminate at the third termination region that is located cattycorner from the third electrical interconnect structure, and the fourth electrical interconnect structure is electrically connected at a fourth corner region of the first surface of the substrate and the two parallel channels of the fourth stress relieve spring extend, in parallel, outward from the periphery of the fourth electrical interconnect structure such that they wrap around a fourth two adjacent sides of the substrate and terminate at the fourth termination region that is located cattycorner from the fourth electrical interconnect structure.