# US 11,443,985 B2 · Discrete piece forming device and discrete piece forming method > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 11,443,985 B2 - Document ID: US11443985B2 - Status: Granted - Kind: B2 - Application number: 17/033,657 - Filed: 2020-09-25 - Published: 2021-01-21 - Granted: 2022-09-13 - Earliest claimed: 2018-03-29 - Assignees: Lintec Corporation - Applicants: Lintec Corporation - Inventors: Yoshiaki Sugishita - Web page: https://patentgrep.com/patent/US11443985B2 ## CPC - H10P 54/00: Cutting or separating of wafers, substrates or parts of devices - H10P 72/74: {using temporarily an auxiliary support} - H10P 72/0428: {Apparatus for mechanical treatment or grinding or cutting} - H10P 72/7402: {Wafer tapes, e.g. grinding or dicing support tapes} - H10W 95/00: Packaging processes not covered by the other groups of this subclass - H10P 72/7414: {the auxiliary support including means facilitating the selective separation of some of a plurality of devices from the auxiliary support} - H10P 72/7416: {used during dicing or grinding} - H10P 72/744: {Details of chemical or physical process used for separating the auxiliary support from a device or a wafer} - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 - H10W: GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10 ## Abstract A discrete piece forming device that forms discrete pieces by dividing a work. The device includes a modified part forming unit which forms modified parts in the work having a pre-pasted adhesive sheet containing swell grains which swell by application of a predetermined energy, to form, in the work, predefined discrete piece areas each surrounded by the modified parts. The device further includes a dividing unit which divides the work into pieces by forming, in the work, cracks starting from the modified parts by applying external force to the work, to form the discrete pieces. The dividing unit applies the energy to parts of the adhesive sheet to swell the swell grains contained in adhesive sheet parts to which the energy has been applied, thereby displacing the predefined discrete piece areas pasted on the adhesive sheet parts to form the discrete pieces. ## Claims ### Claim 1 A discrete piece forming device comprising: a modified part forming unit which forms a modified part in a work having a pre-pasted adhesive sheet containing a swell grain which swells by application of a predetermined energy, the modified part being a part of the work where a property of the work is modified but the work is not cut apart, thereby defining, in the work, a predefined discrete piece area surrounded by the modified part or surrounded by the modified part and an outer edge of the work, while leaving the work as a substantially single body without dividing the work until a crack is formed in the work; and a dividing unit which divides the work by forming, in the work, the crack starting from the modified part by applying external force to the work, to form a discrete piece, wherein the dividing unit applies the energy to a part of the adhesive sheet to swell the swell grain contained in the part of the adhesive sheet to which the energy has been applied, thereby displacing the predefined discrete piece area pasted on the part of the adhesive sheet to form the discrete piece. ### Claim 2 (depends on 1) The discrete piece forming device of claim 1, further comprising a moving unit by which the work and the dividing unit move with respect to each other. ### Claim 3 (depends on 2) The discrete piece forming device of claim 2, wherein the modified part includes a first modified part extending along a first direction and a second modified part extending along a second direction intersecting with the first direction, wherein the dividing unit is configured to form a line-shape application area in which an application area of the energy extends in a predetermined direction, at a position to which the energy is applied, and wherein the moving unit moves the line-shaped application area to make the line-shaped application area parallel to the first direction, and further moves the line-shaped application area to make the line-shaped application area parallel to the second direction. ### Claim 4 (depends on 1) The discrete piece forming device of claim 1, wherein the swell grain comprises: a first swell grain that is swollen by a first energy; and a second swell grain that is swollen by a second energy, and wherein the dividing unit comprises: a first dividing unit that applies the first energy; and a second dividing unit that applies the second energy. ### Claim 5 (depends on 1) The discrete piece forming device of claim 1, further comprising a displacement inhibiting unit which inhibits displacement of a part of the work that has not yet been displaced by the dividing unit. ### Claim 6 (depends on 2) The discrete piece forming device of claim 2, wherein the swell grain comprises: a first swell grain that is swollen by a first energy; and a second swell grain that is swollen by a second energy, and wherein the dividing unit comprises: a first dividing unit that applies the first energy; and a second dividing unit that applies the second energy. ### Claim 7 (depends on 2) The discrete piece forming device of claim 2, further comprising a displacement inhibiting unit which inhibits displacement of a part of the work that has not yet been displaced by the dividing unit. ### Claim 8 (depends on 3) The discrete piece forming device of claim 3, further comprising a displacement inhibiting unit which inhibits displacement of a part of the work that has not yet been displaced by the dividing unit. ### Claim 9 (depends on 4) The discrete piece forming device of claim 4, further comprising a displacement inhibiting unit which inhibits displacement of a part of the work that has not yet been displaced by the dividing unit. ### Claim 10 (depends on 6) The discrete piece forming device of claim 6, further comprising a displacement inhibiting unit which inhibits displacement of a part of the work that has not yet been displaced by the dividing unit. ### Claim 11 (depends on 3) The discrete piece forming device of claim 3, wherein the swell grain comprises: a first swell grain that is swollen by a first energy; and a second swell grain that is swollen by a second energy, and wherein the dividing unit comprises: a first dividing unit that applies the first energy; and a second dividing unit that applies the second energy. ### Claim 12 (depends on 11) The discrete piece forming device of claim 11, further comprising a displacement inhibiting unit which inhibits displacement of a part of the work that has not yet been displaced by the dividing unit. ### Claim 13 A discrete piece forming device comprising: a dividing unit which divides a work by forming a crack in the work, to form a discrete piece, the work having (i) a pre-pasted adhesive sheet containing a swell grain which swells by application of a predetermined energy, (ii) a modified part, which is a part of the work where a property of the work is modified but the work is not cut apart, and (iii) a predefined discrete piece area surrounded by the modified part or surrounded by the modified part and an outer edge of the work in a state in which the work remains as a substantially single body without being divided until the crack is formed in the work, and the dividing unit forming the crack in the work with the modified part serving as a starting point by applying external force to the work, wherein the dividing unit applies the energy to a part of the adhesive sheet to swell the swell grain contained in the part of the adhesive sheet to which the energy has been applied, thereby displacing the predefined discrete piece area pasted on the part of the adhesive sheet to form the discrete piece. ### Claim 14 (depends on 13) The discrete piece forming device of claim 13, further comprising a moving unit by which the work and the dividing unit move with respect to each other. ### Claim 15 (depends on 14) The discrete piece forming device of claim 14, wherein the modified part includes a first modified part extending along a first direction and a second modified part extending along a second direction intersecting with the first direction, wherein the dividing unit is configured to form a line-shape application area in which an application area of the energy extends in a predetermined direction, at a position to which the energy is applied, and wherein the moving unit moves the line-shaped application area to make the line-shaped application area parallel to the first direction, and further moves the line-shaped application area to make the line-shaped application area parallel to the second direction. ### Claim 16 (depends on 13) The discrete piece forming device of claim 13, wherein the swell grain comprises: a first swell grain that is swollen by a first energy; and a second swell grain that is swollen by a second energy, and wherein the dividing unit comprises: a first dividing unit that applies the first energy; and a second dividing unit that applies the second energy. ### Claim 17 (depends on 13) The discrete piece forming device of claim 13, further comprising a displacement inhibiting unit which inhibits displacement of a part of the work that has not yet been displaced by the dividing unit. ### Claim 18 (depends on 14) The discrete piece forming device of claim 14, wherein the swell grain comprises: a first swell grain that is swollen by a first energy; and a second swell grain that is swollen by a second energy, and wherein the dividing unit comprises: a first dividing unit that applies the first energy; and a second dividing unit that applies the second energy. ### Claim 19 (depends on 14) The discrete piece forming device of claim 14, further comprising a displacement inhibiting unit which inhibits displacement of a part of the work that has not yet been displaced by the dividing unit. ### Claim 20 (depends on 15) The discrete piece forming device of claim 15, further comprising a displacement inhibiting unit which inhibits displacement of a part of the work that has not yet been displaced by the dividing unit. ### Claim 21 (depends on 16) The discrete piece forming device of claim 16, further comprising a displacement inhibiting unit which inhibits displacement of a part of the work that has not yet been displaced by the dividing unit. ### Claim 22 (depends on 18) The discrete piece forming device of claim 18, further comprising a displacement inhibiting unit which inhibits displacement of a part of the work that has not yet been displaced by the dividing unit. ### Claim 23 (depends on 15) The discrete piece forming device of claim 15, wherein the swell grain comprises: a first swell grain that is swollen by a first energy; and a second swell grain that is swollen by a second energy, and wherein the dividing unit comprises: a first dividing unit that applies the first energy; and a second dividing unit that applies the second energy. ### Claim 24 (depends on 23) The discrete piece forming device of claim 23, further comprising a displacement inhibiting unit which inhibits displacement of a part of the work that has not yet been displaced by the dividing unit. ### Claim 25 A discrete piece forming method comprising: forming a modified part in a work having a pre-pasted adhesive sheet containing a swell grain which swells by application of a predetermined energy, the modified part being a part of the work where a property of the work is modified but the work is not cut apart, thereby defining, in the work, a predefined discrete piece area surrounded by the modified part or surrounded by the modified part and an outer edge of the work, while leaving the work as a substantially single body without dividing the work until a crack is formed in the work; and dividing the work by forming, in the work, the crack starting from the modified part by applying external force to the work, to form a discrete piece, wherein the dividing includes applying the energy to a part of the adhesive sheet to swell the swell grain contained in the part of the adhesive sheet to which the energy has been applied, thereby displacing the predefined discrete piece area pasted on the part of the adhesive sheet to form the discrete piece. ### Claim 26 A discrete piece forming method comprising: dividing a work by forming a crack in the work, to form a discrete piece, the work having (i) a pre-pasted adhesive sheet containing a swell grain which swells by application of a predetermined energy, (ii) a modified part, which is a part of the work where a property of the work is modified but the work is not cut apart, and (iii) a predefined discrete piece area surrounded by the modified part or surrounded by the modified part and an outer edge of the work in a state in which the work remains as a substantially single body without being divided until the crack is formed in the work, and the dividing forming the crack in the work with the modified part serving as a starting point by applying external force to the work, wherein the dividing includes applying the energy to a part of the adhesive sheet to swell the swell grain contained in the part of the adhesive sheet to which the energy has been applied, thereby displacing the predefined discrete piece area pasted on the part of the adhesive sheet to form the discrete piece.