System and method for dispensing liquid spin-on glass (SOG) onto semiconductor wafers
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorYung-Tsun Liu
Life of this patent
Estimating the term…
Abstract
A spin-on glass (SOG) depositing system includes a suck back (SB) valve arranged to receive SOG. The SOG depositing system further includes a SOG dispenser having a nozzle, the SOG dispenser coupled with the SB valve for receiving SOG. The SOG depositing system further includes a detector positioned to detect SOG outside the nozzle. The SOG depositing system further includes an SB valve controller coupled with the detector for receiving one or more signals from the detector and coupled with the SB valve for controlling operation of the SB valve, wherein the SB valve controller is configured to pause sensing by the detector based on the sensed amount of SOG outside the nozzle being outside at least one operating parameter.
Claims16
A liquid spin-on glass (SOG) depositing system, comprising:
- a suck back (SB) valve arranged to receive liquid SOG;
- a liquid SOG dispenser having a nozzle, the liquid SOG dispenser coupled with the SB valve for receiving liquid SOG;
- a detector positioned to detect liquid SOG outside the nozzle;
- and
- an SB valve controller coupled with the detector for receiving one or more signals from the detector and coupled with the SB valve for controlling operation of the SB valve, wherein the SB valve controller is configured to pause sensing by the detector based on the sensed amount of SOG outside the nozzle indicates the liquid SOG depositing system is operating outside at least one operating parameter, wherein the SB valve comprises:
- a switch valve;
- and
- an adjustment valve, wherein the adjustment valve is between the switch valve and the nozzle, wherein the SB valve controller is configured to withdraw liquid SOG outside of the nozzle, in response to the detected amount of liquid SOG outside the nozzle being outside of the at least one operating parameter, by closing the switch valve and opening the adjustment valve.
A liquid spin-on glass (SOG) depositing system, comprising:
- a suck back (SB) valve for receiving liquid SOG;
- a nozzle connected to the SB valve, wherein the nozzle is configured to receive liquid SOG from the SB valve;
- an optical detector for detecting liquid SOG outside the nozzle;
- and
- an SB valve controller configured to receive a signal from the optical detector, wherein the SB valve controller is configured to control operation of the SB valve, and to pause sensing by the optical detector in response to a detected amount of liquid SOG outside the nozzle indicates the liquid SOG depositing system is operating outside at least one operating parameter, wherein the SB valve comprises:
- a switch valve;
- and
- an adjustment valve, wherein the adjustment valve is between the switch valve and the nozzle, wherein the SB valve controller is configured to withdraw liquid SOG outside of the nozzle, in response to the detected amount of liquid SOG outside the nozzle being outside of the at least one operating parameter, by closing the switch valve and opening the adjustment valve.
A liquid spin-on glass (SOG) depositing system, comprising:
- a suck back (SB) valve for receiving liquid SOG;
- a nozzle connected to the SB valve, wherein the nozzle is configured to receive liquid SOG from the SB valve;
- a detector for detecting liquid SOG outside the nozzle, wherein the detector is configured to detect a length of the liquid SOG extending from the nozzle;
- an SB valve controller configured to receive a signal from the detector, wherein the SB valve controller is configured to control operation of the SB valve, and to pause sensing by the detector in response to a detected amount of liquid SOG outside the nozzle being indicates the liquid SOG depositing system is operating outside at least one operating parameter;
- and
- a tool interlock circuit, wherein the tool interlock circuit is configured to instruct the SB valve controller to close the SB valve in response to the liquid SOG depositing system operating outside of predetermined operation parameters.
Dependencies are inferred from the claim text.