High voltage vacuum feedthrough
AssigneeASML Netherlands B.V.
InventorRonald Van Der Wilk
Life of this patent
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Abstract
A feedthrough for providing an electrical connection is provided. The feedthrough comprises a conductor and a quartz or a glass structure configured to surround at least a portion of the conductor and provide isolation to the conductor. The conductor and the quartz or glass structure may be coaxially arranged. The feedthrough can provide an electrical connection between an inside and outside of a vacuum chamber that contains a sample.
Claims21
A vacuum system comprising:
- a vacuum chamber;
- and
- a feedthrough coupled to the vacuum chamber and configured to provide an electrical connection between an inside and an outside of the vacuum chamber, the feedthrough comprising:
- a conductor;
- an insulating structure surrounding at least a portion of the conductor, wherein the insulating structure comprises quartz or glass;
- and
- an adhesion layer that attaches the conductor to the insulating structure in an airtight manner.
A feedthrough for providing an electrical connection between an inside and an outside of a vacuum chamber, the feedthrough comprising:
- a conductor;
- an insulating structure surrounding at least a portion of the conductor, wherein the insulating structure comprises quartz or glass;
- and
- an adhesion layer that attaches the conductor to the insulating structure in an airtight manner to enable the feedthrough to be used to provide an electrical connection between the inside and the outside of the vacuum chamber.
A feedthrough for providing an electrical connection between an inside and an outside of a vacuum chamber, the feedthrough comprising:
- a conductor;
- an insulating structure surrounding at least a portion of the conductor;
- an adhesion layer that attaches the conductor to the insulating structure in an airtight manner to enable the feedthrough to be used to provide an electrical connection between the inside and the outside of the vacuum chamber;
- and
- a bent portion comprised of at least one of the conductor, the insulating structure, or the adhesion layer.
Dependencies are inferred from the claim text.