Method for producing a scattered beam collimator, scattered beam collimator and x-ray device with scattered beam collimator
AssigneeSiemens Healthcare GmbH
InventorsThorsten Ergler, Stefan Wirth, Vojislav Krstic, Maria Magdalena Kolesnik-Gray
Life of this patent
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Abstract
A method is for producing a scattered beam collimator starting from a lower side and extending in a build-up direction as far as an upper side, and having a large number of X-ray absorbing partitions, and in which pass-through channels for unscattered X-ray radiation are embodied between the partitions. A lithographic process is used, by which the partitions of the scattered beam collimator are formed from a photoresist into which an X-ray absorbing material is mixed.
Claims19
A method for producing a scattered beam collimator starting from a lower side of the scattered beam collimator and extending in a build-up direction to an upper side of the scattered beam collimator, the scattered beam collimator including a number of X-ray absorbing partitions with pass-through channels for unscattered X-ray radiation embodied between the X-ray absorbing partitions, the method comprising:
- forming the number of X-ray absorbing partitions of the scattered beam collimator, using a lithographic process, from a photoresist into which an X-ray absorbing material is mixed;
- wherein
- the X-ray absorbing material is mixed into the photoresist such that a volumetric proportion of the X-ray absorbing material is at least approximately 30%.
The method of 7, further comprising:
- building up the scattered beam collimator or a module of the scattered beam collimator in layers on the substrate, in a build-up direction, by repeating the lithographic process.
Dependencies are inferred from the claim text.