# US 11,443,420 B2 · Generating a metrology recipe usable for examination of a semiconductor specimen > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 11,443,420 B2 - Document ID: US11443420B2 - Status: Granted - Kind: B2 - Application number: 17/135,939 - Filed: 2020-12-28 - Published: 2022-06-30 - Granted: 2022-09-13 - Earliest claimed: 2020-12-28 - Assignees: Applied Materials Israel Ltd. - Applicants: Applied Materials Israel Ltd. - Inventors: Roman Kris; Grigory Klebanov; Einat Frishman; Tal Orenstein; Meir Vengrover; Noa Marom; Ilan Ben-Harush; Rafael Bistritzer; Sharon Duvdevani-Bar - Web page: https://patentgrep.com/patent/US11443420B2 ## CPC - G03F 7/70625: {Dimensions, e.g. line width, critical dimension [CD], profile, sidewall angle or edge roughness} - G06T 7/001: {using an image reference approach} - G01N 21/9501: {Semiconductor wafers (manufacturing processes per se of semiconductor devices implementing a measuring step H10P74/20)} - G03F 7/70616: {Monitoring the printed patterns} - G03F 7/7065: {Defects, e.g. optical inspection of patterned layer for defects} - G06T 2207/30148: Semiconductor; IC; Wafer - G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G) - G06T: IMAGE DATA PROCESSING OR GENERATION, IN GENERAL - G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q) ## Abstract There is provided a system and method of generating a metrology recipe usable for examining a semiconductor specimen, comprising: obtaining a first image set comprising a plurality of first images captured by an examination tool, obtaining a second image set comprising a plurality of second images, wherein each second image is simulated based on at least one first image, wherein each second image is associated with ground truth data; performing a first test on the first image set and a second test on the second image set in accordance with a metrology recipe configured with a first parameter set, and determining, in response to a predetermined criterion not being met, to select a second parameter set, configure the metrology recipe with the second parameter set, and repeat the first test and the second test in accordance with the metrology recipe configured with the second parameter set. ## Claims ### Claim 1 A computerized system of generating a metrology recipe usable for examining a semiconductor specimen, the system comprising a processing and memory circuitry (PMC) configured to peform operations comprising: obtaining a first image set comprising a plurality of first images captured by an examination tool, each first image informative of at least one first image structural element (ISE) representing at least one structural element (SE) on the semiconductor specimen; obtaining a second image set comprising a plurality of second images, wherein each second image is simulated based on at least one first image and informative of at least one second ISE representing the at least one SE, wherein the at least one second ISE in each second image is resized to a respective scale with reference to the at least one first ISE, and wherein each second image is associated with ground truth data related to the respective scale of the at least one second ISE; performing a first test on the first image set, comprising: performing a metrology operation on the first image set in accordance with a metrology recipe configured with a first parameter set, giving rise to a plurality of first measurements corresponding to the plurality of first images, and calculating a first score indicative of precision of the metrology recipe based on the plurality of first measurements; performing a second test on the second image set, comprising: performing the metrology operation on the second image set in accordance with the metrology recipe, giving rise to a plurality of second measurements corresponding to the plurality of second images, and calculating a second score indicative of sensitivity of the metrology recipe based on the plurality of second measurements with respect to the associated ground truth data; and determining, in response to a predetermined criterion related to the first score and the second score not being met, to select a second parameter set, configure the metrology recipe with the second parameter set, and repeat the first test and the second test in accordance with the metrology recipe configured with the second parameter set. ### Claim 2 (depends on 1) The computerized system according to claim 1, wherein the plurality of first images are captured from one or more sites on the semiconductor specimen. ### Claim 3 (depends on 1) The computerized system according to claim 1, wherein the PMC is further configured to perform further operations comprising generating the second image set, comprising: generating a first design image based on the at least one first image, the first design image informative of at least one design structural element (DSE) corresponding to the at least one ISE and associated with first ground truth data related to a first scale of the at least one DSE; generating one or more additional design images each informative of the at least one DSE resized to a respective scale with reference to the first scale, giving rise to a plurality of design images comprising the first design image and the additional design images associated with respective ground truth data related to respective scales of the at least one DSE; and using the plurality of design images to generate the second image set, comprising: simulating, based on the plurality of design images, one or more effects caused by one or more physical processes of the semiconductor specimen, giving rise to the plurality of second images associated with the respective ground truth data. ### Claim 4 (depends on 3) The computerized system according to claim 3, wherein the simulating comprises: performing a first simulation on the plurality of design images to simulate effects caused by a fabrication process of the semiconductor specimen, giving rise to a plurality of first simulated images; performing a second simulation on the plurality of first simulated images to simulate effects caused by a scanning process of the semiconductor specimen, giving rise to a plurality of second simulated images; performing a third simulation on the plurality of second images to simulate effects caused by a signal processing process of the semiconductor specimen, giving rise to the plurality of second images; and associating the plurality of second images with the respective ground truth data. ### Claim 5 (depends on 1) The computerized system according to claim 1, wherein the PMC is configured to calculate the first score by calculating variance among the plurality of first measurements based on a precision measure. ### Claim 6 (depends on 1) The computerized system according to claim 1, wherein the PMC is configured to calculate the second score by estimating a linear regression function between the plurality of second measurements and the associated ground truth data, and obtaining the second score based on the estimated linear regression function. ### Claim 7 (depends on 1) The computerized system according to claim 1, wherein the PMC is further configured to obtain a third image set comprising at least one first image, and perform a third test on the third image set, comprising: perform a metrology operation on the third image set in accordance with the metrology recipe, and calculate a third score indicative of throughput of the metrology recipe based on duration of the metrology operation. ### Claim 8 (depends on 1) The computerized system according to claim 1, wherein the first parameter set comprises a plurality of recipe parameters assigned with first values, the recipe parameters selected from a group comprising: measurement algorithm parameters and image generation parameters. ### Claim 9 (depends on 8) The computerized system according to claim 8, wherein the second parameter set comprises the plurality of recipe parameters assigned with second values which are selected automatically using an optimization method. ### Claim 10 (depends on 1) The computerized system according to claim 1, wherein the PMC is further configured to repeat the first test and the second test one or more times in accordance with the metrology recipe configured with one or more additional parameter sets, until the predetermined criterion is met, thereby generating a metrology recipe usable for runtime examination of the semiconductor specimen. ### Claim 11 (depends on 1) The computerized system according to claim 1, wherein the metrology recipe is defined in accordance with a metrology application selected from a group comprising: Measurement-Based Inspection (MBI), Critical Dimension Uniformity (CDU), Lithography process control, CAD Awareness (CADA), and Overlay (OVL). ### Claim 12 A computerized method of generating a metrology recipe usable for examining a semiconductor specimen, the method performed by a processing and memory circuitry (PMC), the method comprising: obtaining a first image set comprising a plurality of first images captured by an examination tool, each first image informative of at least one first image structural element (ISE) representing at least one structural element (SE) on the semiconductor specimen; obtaining a second image set comprising a plurality of second images, wherein each second image is simulated based on at least one first image and informative of at least one second ISE representing the at least one SE, wherein the at least one second ISE in each second image is resized to a respective scale with reference to the at least one first ISE, and wherein each second image is associated with ground truth data related to the respective scale of the at least one second ISE; performing a first test on the first image set, comprising: performing a metrology operation on the first image set in accordance with a metrology recipe configured with a first parameter set, giving rise to a plurality of first measurements corresponding to the plurality of first images, and calculating a first score indicative of precision of the metrology recipe based on the plurality of first measurements; performing a second test on the second image set, comprising: performing the metrology operation on the second image set in accordance with the metrology recipe, giving rise to a plurality of second measurements corresponding to the plurality of second images, and calculating a second score indicative of sensitivity of the metrology recipe based on the plurality of second measurements with respect to the associated ground truth data; and determining, in response to a predetermined criterion related to the first score and the second score not being met, to select a second parameter set, configure the metrology recipe with the second parameter set, and repeat the first test and the second test in accordance with the metrology recipe configured with the second parameter set. ### Claim 13 (depends on 12) The computerized method according to claim 12, wherein the plurality of first images are captured from one or more sites on the semiconductor specimen. ### Claim 14 (depends on 12) The computerized method according to claim 12, wherein the second image set is generated by: generating a first design image based on the at least one first image, the first design image informative of at least one design structural element (DSE) corresponding to the at least one ISE and associated with first ground truth data related to a first scale of the at least one DSE; generating one or more additional design images each informative of the at least one DSE resized to a respective scale with reference to the first scale, giving rise to a plurality of design images comprising the first design image and the additional design images associated with respective ground truth data related to respective scales of the at least one DSE; and using the plurality of design images to generate the second image set, comprising: simulating, based on the plurality of design images, one or more effects caused by one or more physical processes of the semiconductor specimen, giving rise to the plurality of second images associated with the respective ground truth data. ### Claim 15 (depends on 14) The computerized method according to claim 14, wherein the simulating comprises: performing a first simulation on the plurality of design images to simulate effects caused by a fabrication process of the semiconductor specimen, giving rise to a plurality of first simulated images; performing a second simulation on the plurality of first simulated images to simulate effects caused by a scanning process of the semiconductor specimen, giving rise to a plurality of second simulated images; performing a third simulation on the plurality of second images to simulate effects caused by a signal processing process of the semiconductor specimen, giving rise to the plurality of second images; and associating the plurality of second images with the respective ground truth data. ### Claim 16 (depends on 12) The computerized method according to claim 12, wherein the first score is calculated by calculating variance among the plurality of first measurements based on a precision measure. ### Claim 17 (depends on 12) The computerized method according to claim 12, wherein the second score is calculated by estimating a linear regression function between the plurality of second measurements and the associated ground truth data, and obtaining the second score based on the estimated linear regression function. ### Claim 18 (depends on 12) The computerized method according to claim 12, further comprising obtaining a third image set comprising at least one first image, and performing a third test on the third image set, comprising: performing a metrology operation on the third image set in accordance with the metrology recipe, and calculating a third score indicative of throughput of the metrology recipe based on duration of the metrology operation, wherein the predetermined criterion is further related to the third score. ### Claim 19 (depends on 12) The computerized method according to claim 12, further comprising repeating the first test and the second test one or more times in accordance with the metrology recipe configured with one or more additional parameter sets, until the predetermined criterion is met, thereby generating a metrology recipe usable for runtime examination of a semiconductor specimen. ### Claim 20 A non-transitory computer readable storage medium tangibly embodying a program of instructions that, when executed by a computer, cause the computer to perform a method of generating a metrology recipe usable for examining a semiconductor specimen, the method comprising: obtaining a first image set comprising a plurality of first images captured by an examination tool, each first image informative of at least one first image structural element (ISE) representing at least one structural element (SE) on the semiconductor specimen; obtaining a second image set comprising a plurality of second images, wherein each second image is simulated based on at least one first image and informative of at least one second ISE representing the at least one SE, wherein the at least one second ISE in each second image is resized to a respective scale with reference to the at least one first ISE, and wherein each second image is associated with ground truth data related to the respective scale of the at least one second ISE; performing a first test on the first image set, comprising: performing a metrology operation on the first image set in accordance with a metrology recipe configured with a first parameter set, giving rise to a plurality of first measurements corresponding to the plurality of first images, and calculating a first score indicative of precision of the metrology recipe based on the plurality of first measurements; performing a second test on the second image set, comprising: performing the metrology operation on the second image set in accordance with the metrology recipe, giving rise to a plurality of second measurements corresponding to the plurality of second images, and calculating a second score indicative of sensitivity of the metrology recipe based on the plurality of second measurements with respect to the associated ground truth data; and determining, in response to a predetermined criterion related to the first score and the second score not being met, to select a second parameter set, configure the metrology recipe with the second parameter set, and repeat the first test and the second test in accordance with the metrology recipe configured with the second parameter set.