Parameter design assistance device and parameter design assistance method

A parameter design assistance method, comprising:

• a combination information generating step of acquiring, by a controller, one or more level values for each of control factors to generate, through statistical technique, combination information representing combinations of the level values acquired;
• and
• an evaluation recipe creating step of creating, by the controller, an evaluation recipe for each of the combinations of the level values based on the combination information and a standard recipe for controlling a substrate processing device that processes a substrate, the standard recipe indicating a standard value of each of parameters required to operate the substrate processing device, the evaluation recipe indicating a parameter value of each of the parameters required to operate the substrate processing device, wherein
• the standard recipe includes a parameter of the parameters corresponding to at least one control factor of the control factors,
• the level values indicate conditions according to which the substrate processing device is to process a substrate, and
• in the evaluation recipe creating step, the controller changes a standard value of the parameter corresponding to the at least one control factor included in the standard recipe to a level value of the at least one control factor for each of the combinations of the level values to create the evaluation recipes from the standard recipe.