# US 11,442,363 B2 · Apparatus for treating substrate > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 11,442,363 B2 - Document ID: US11442363B2 - Status: Granted - Kind: B2 - Application number: 16/896,538 - Filed: 2020-06-09 - Published: 2020-12-17 - Granted: 2022-09-13 - Earliest claimed: 2019-06-11 - Assignees: Semes Co., Ltd. - Applicants: Semes Co., Ltd. - Inventors: Daesung Kim; Eunwoo Park - Web page: https://patentgrep.com/patent/US11442363B2 ## CPC - G03F 7/162: {Coating on a rotating support, e.g. using a whirler or a spinner} - B05B 13/02: Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work (B05B13/06 takes precedence) - B05C 5/001: {incorporating means for heating or cooling the liquid or other fluent material (B05C11/1042 takes precedence)} - H10P 72/0402: {Apparatus for fluid treatment (H10P72/0441, H10P72/0448 take precedence)} - H10P 72/0434: {mainly by convection} - H10P 72/0448: {Apparatus for applying a liquid, a resin, an ink or the like} - H10P 72/0458: {vertical arrangement} - H10P 72/0602: {Temperature monitoring} - G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G) - B05B: SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES (spray-mixers with nozzles B01F25/72; processes for applying liquids or other fluent materials to surfaces by spraying B05D) - B05C: APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL (spraying apparatus, atomising apparatus, nozzles B05B; plant for applying liquids or other fluent materials to objects by electrostatic spraying B05B5/08) - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 ## Abstract An apparatus for treating a substrate includes a treatment vessel having a treatment space therein, a substrate support unit that supports the substrate in the treatment space, and a liquid dispensing unit that dispenses a treatment liquid onto the substrate placed on the substrate support unit. The liquid dispensing unit includes a treatment liquid tube through which the treatment liquid flows, a constant-temperature water tube through which constant-temperature water flows and that surrounds the treatment liquid tube, wherein the constant-temperature water maintains the treatment liquid, which flows through the treatment liquid tube, at a set temperature, a constant-temperature water supply tube that supplies the constant-temperature water to the constant-temperature water tube, and an activation member that is installed in the constant-temperature water supply tube and that activates ions in the constant-temperature water. ## Claims ### Claim 1 An apparatus for treating a substrate, the apparatus comprising: a treatment vessel having a treatment space inside the treatment vessel; a substrate support unit configured to support the substrate in the treatment space; and a liquid dispensing unit configured to dispense a treatment liquid onto the substrate placed on the substrate support unit, wherein the liquid dispensing unit includes, a treatment liquid tube through which the treatment liquid flows, a constant-temperature water tube through which constant-temperature water flows, the constant-temperature water tube being configured to surround the treatment liquid tube, wherein the constant-temperature water tube is configured to have the constant-temperature water maintain the treatment liquid, which flows through the treatment liquid tube, at a set temperature, a constant-temperature water supply tube configured to supply the constant-temperature water to the constant-temperature water tube, and an activation member installed in the constant-temperature water supply tube and configured to activate ions in the constant-temperature water, the activation of the ions based on friction between the activation member and the constant-temperature water, wherein the constant-temperature water supply tube includes an upstream water supply tube and a downstream water supply tube, and the activation member is detachably between the upstream water supply tube and the downstream water supply tube. ### Claim 2 (depends on 1) The apparatus of claim 1, wherein the ions include H+ and OH—. ### Claim 3 (depends on 1) The apparatus of claim 1, wherein the activation member includes a first organic tube, a second metal tube connectable to the first organic tube, and a third organic tube connectable to the second metal tube. ### Claim 4 (depends on 3) The apparatus of claim 3, wherein the first organic tube is configured to be connected to the second metal tube with a first threaded connected, and the third organic tube is configured to be connected to the second metal tube with a second threaded connection. ### Claim 5 (depends on 4) The apparatus of claim 4, wherein the first organic tube and the third organic tube have female threads, and the second metal tube has male threads. ### Claim 6 (depends on 1) The apparatus of claim 1, wherein the treatment liquid includes a light-sensitive liquid. ### Claim 7 (depends on 1) The apparatus of claim 1, further comprising: a heater along the constant-temperature water supply tube, the heater configured to heat the constant-temperature water. ### Claim 8 An apparatus for treating a substrate, the apparatus comprising: a treatment vessel having a treatment space inside the treatment vessel; a substrate support unit configured to support the substrate in the treatment space; and a liquid dispensing unit configured to dispense a treatment liquid onto the substrate placed on the substrate support unit, wherein the liquid dispensing unit includes, a treatment liquid tube through which the treatment liquid flows, a constant-temperature water tube through which constant-temperature water flows, the constant-temperature water tube being configured to surround the treatment liquid tube, wherein the constant-temperature water tube is configured to have the constant-temperature water maintain the treatment liquid, which flows through the treatment liquid tube, at a set temperature, a constant-temperature water supply tube configured to supply the constant-temperature water to the constant-temperature water tube, and an activation member installed in the constant-temperature water supply tube and configured to activate ions in the constant-temperature water, wherein the constant-temperature water supply tube includes, an upstream-side supply tube configured to connect a constant-temperature water source and the activation member, and a downstream-side supply tube configured to connect the constant-temperature water tube and the activation member, and wherein the activation member is detachable from the upstream-side supply tube and the downstream-side supply tube. ### Claim 9 (depends on 8) The apparatus of claim 8, wherein the activation member includes: a metal tube; and an organic tube disposed adjacent to the metal tube. ### Claim 10 (depends on 9) The apparatus of claim 9, wherein the organic tube includes: a first organic tube configured to connect the upstream-side supply tube and one end of the metal tube; and a second organic tube configured to connect the downstream-side supply tube and an opposite end of the metal tube. ### Claim 11 (depends on 10) The apparatus of claim 10, wherein each of the first organic tube and the second organic tube define a plurality of fluid channels in which the constant-temperature water flows. ### Claim 12 (depends on 10) The apparatus of claim 10, wherein the metal tube includes a material containing zinc, and wherein each of the first organic tube and the second organic tube includes a material containing carbon. ### Claim 13 (depends on 12) The apparatus of claim 12, wherein the liquid dispensing unit further includes: a manifold configured to connect the constant-temperature water tube and the constant-temperature water supply tube; and a constant-temperature water collection tube configured to collect the constant-temperature water from the manifold into the constant-temperature water source. ### Claim 14 (depends on 13) The apparatus of claim 13, wherein the activation member is additionally installed in the constant-temperature water collection tube. ### Claim 15 (depends on 9) The apparatus of claim 9, wherein the organic tube defines a plurality of fluid channels in which the constant-temperature water flows, and wherein the metal tube defines a single fluid channel which is in fluid communication with the fluid channels. ### Claim 16 (depends on 8) The apparatus of claim 8, wherein the treatment liquid includes a light-sensitive liquid. ### Claim 17 (depends on 8) The apparatus of claim 8, further comprising: a heater along the constant-temperature water supply tube, the heater configured to heat the constant-temperature water.