# US 11,442,360 B2 · Planarized layer forming apparatus, and method of manufacturing article > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 11,442,360 B2 - Document ID: US11442360B2 - Status: Granted - Kind: B2 - Application number: 16/669,974 - Filed: 2019-10-31 - Published: 2020-05-07 - Granted: 2022-09-13 - Earliest claimed: 2018-11-05 - Assignees: Canon Kabushiki Kaisha - Applicants: Canon Kabushiki Kaisha - Inventors: Hiro Norikane - Web page: https://patentgrep.com/patent/US11442360B2 ## CPC - G03F 7/0002: {Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping} - G03F 7/70483: {Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring} - G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G) ## Abstract A planarized layer forming apparatus operable to use a pressing member to form a planarized layer of a curable composition on a substrate is provided. The apparatus comprises a pressing member holder for holding the pressing member, a substrate holder for holding the substrate, a curing device for curing the curable composition on the substrate, and a chamber for containing the pressing member holder and the substrate holder, and form a sealed space. The curable composition is caused to come into contact with the pressing member. After the contact, holding of the pressing member is released, and a space inside the chamber is pressurized. In a state where holding of the pressing member is released and the space inside the chamber is pressurized, the planarized layer is formed by curing the curable composition by the curing device. ## Claims ### Claim 1 A planarized layer forming apparatus operable to use a pressing member to form a planarized layer of a curable composition on a substrate, the apparatus comprising: a pressing member holder configured to hold the pressing member; a substrate holder configured to hold the substrate; a curing device configured to cure the curable composition on the substrate; a chamber configured to contain the pressing member holder and the substrate holder, and form a sealed space; and a sealing member arranged between the curing device and the pressing member, wherein the pressing member holder also holds the sealing member to form a closed space between the pressing member and the sealing member, and, wherein the curable composition on the substrate is caused to come into contact with the pressing member by causing a pressure inside the closed space to increase, causing the pressing member to deform to have a convex shape toward the substrate, after the contact, holding of the pressing member by the pressing member holder is released, and a space inside the chamber is pressurized, and in a state where holding of the pressing member by the pressing member holder is released and the space inside the chamber is pressurized, the planarized layer is formed by curing the curable composition by the curing device. ### Claim 2 (depends on 1) The planarized layer forming apparatus according to claim 1, wherein an outer diameter of the pressing member is the same as an outer diameter of the substrate, and the pressing member holder is configured to hold the pressing member by attracting a peripheral portion of the pressing member. ### Claim 3 (depends on 1) The planarized layer forming apparatus according to claim 1, wherein adjustment of pressure of a space inside the chamber and adjustment of pressure inside the closed space are performed using different pressure controllers. ### Claim 4 (depends on 3) The planarized layer forming apparatus according to claim 3, wherein the contact starts after the pressure inside the closed space is caused to increase by using a first pressure controller to deform the pressing member into a convex shape toward the substrate, and after the contact completes, the space inside the chamber is pressurized using a second pressure controller so that the pressure inside the space inside the chamber is the same as the pressure inside the closed space. ### Claim 5 (depends on 1) The planarized layer forming apparatus according to claim 1, wherein after holding of the pressing member by the pressing member holder is released, a pressure controller used for adjustment of the pressure inside the closed space is used to pressurize the space inside the chamber. ### Claim 6 (depends on 1) The planarized layer forming apparatus according to claim 1, wherein the curing device cures the curable composition by irradiating light onto the curable composition, and the pressing member holder is formed by an optically transparent member. ### Claim 7 (depends on 1) The planarized layer forming apparatus according to claim 1, wherein, after curing the curable composition, holding of the pressing member by the pressing member holder is resumed, and the pressing member is separated from the curable composition. ### Claim 8 (depends on 1) The planarized layer forming apparatus according to claim 1, further comprising an extensible member provided in a region that surrounds the pressing member holder and the substrate holder, and configured to extend by being supplied with a compressed gas, wherein the chamber is formed by extending the extensible member. ### Claim 9 A method of manufacturing an article, comprising: forming a planarized layer on a substrate using a planarized layer forming apparatus including: a pressing member holder configured to hold the pressing member; a substrate holder configured to hold the substrate; a curing device configured to cure the curable composition on the substrate; and a chamber configured to contain the pressing member holder and the substrate holder, and form a sealed space; and a sealing member arranged between the curing device and the pressing member, wherein the pressing member holder also holds the sealing member to form a closed space between the pressing member and the sealing member, and wherein the curable composition on the substrate is caused to come into contact with the pressing member by causing a pressure inside the closed space to increase, causing the pressing member to deform to have a convex shape toward the substrate, after the contact, holding of the pressing member by the pressing member holder is released, and a space inside the chamber is pressurized, and in a state where holding of the pressing member by the pressing member holder is released and the space inside the chamber is pressurized, the planarized layer is formed by curing the curable composition by the curing device; and processing the substrate on which the planarized layer has been formed, wherein the article is manufactured from the processed substrate.