# US 11,442,225 B2 · Wavelength conversion element and method for manufacturing wavelength conversion element > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 11,442,225 B2 - Document ID: US11442225B2 - Status: Granted - Kind: B2 - Application number: 17/054,091 - Filed: 2019-04-18 - Published: 2021-07-22 - Granted: 2022-09-13 - Earliest claimed: 2018-05-11 - Assignees: Nippon Telegraph and Telephone Corporation - Applicants: Nippon Telegraph and Telephone Corporation - Inventors: Takahiro Kashiwazaki; Ryoichi Kasahara; Osamu Tadanaga; Takeshi Umeki; Koji Embutsu; Takushi Kazama - Web page: https://patentgrep.com/patent/US11442225B2 ## CPC - G02B 6/122: Basic optical elements, e.g. light-guiding paths - G02B 6/13: Integrated optical circuits characterised by the manufacturing method - G02F 1/377: in an optical waveguide structure - G02B 6/12011: {characterised by the arrayed waveguides, e.g. comprising a filled groove in the array section} - G02B 2006/1204: {Lithium niobate (LiNbO3)} - G02B 2006/12045: {Lithium tantalate (LiTaO3)} - G02B 2006/12126: {Light absorber} - G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS - G02F: OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS ## Abstract With a wavelength conversion device based on a nonlinear optical effect, when arrayed waveguides including an intended nonlinear waveguide are fabricated, unwanted slab waveguides are inevitably formed. The slab waveguides can cause an erroneous measurement in the selection of a waveguide having desired characteristics from the arrayed waveguides. The erroneous measurement can lead to redoing steps for fabricating the wavelength conversion device and a decrease in the yield and inhibit the evaluation of the characteristics in selection of the waveguide and the subsequent fabrication of the wavelength conversion device from being efficiently performed. A wavelength conversion device according to the present invention includes a plurality of waveguides formed on a substrate, and a plurality of slab waveguides that are arranged substantially in parallel with and spaced apart from the plurality of waveguides, and a guided light attenuator is formed in each of the slab waveguides. The guided light attenuators allow efficient selection of a waveguide having desired optical characteristics from the plurality of waveguides. The light attenuation by the guided light attenuators can be changed in steps for fabricating the wavelength conversion device. ## Claims ### Claim 1 A wavelength conversion device, comprising: a plurality of waveguides formed on a substrate of a nonlinear material; a plurality of slab waveguides that are arranged substantially in parallel with and spaced apart from the plurality of waveguides; and guided light attenuators formed of a material having an index of refraction different from an index of refraction of a material forming the slab waveguide in the plurality of slab waveguides, wherein the guided light attenuator is a groove formed in the slab waveguide as an internal region thereof by removing the material forming the slab waveguide, and of slab waveguides adjacent to one of the plurality of waveguides, at least the groove formed in the slab waveguide on one side of the one waveguide is completely filled with a solid material having an index of refraction greater than 1. ### Claim 2 (depends on 1) The wavelength conversion device according to claim 1, wherein the guided light attenuator is formed as an internal region of the slab waveguide on a face of the substrate in which there is not the material forming the slab waveguide. ### Claim 3 (depends on 1) The wavelength conversion device according to claim 1, wherein on a face of the substrate, the guided light attenuator has a shape that is asymmetrical with respect to a light guide direction in the plurality of slab waveguides. ### Claim 4 (depends on 1) The wavelength conversion device according to claim 1, wherein the plurality of waveguides and the plurality of slab waveguides are straight waveguides, and a configuration parameter that determines a size of a core of each of the plurality of waveguides gradually varies between the plurality of waveguides. ### Claim 5 (depends on 1) The wavelength conversion device according to claim 1, wherein the plurality of waveguides is made of LiNbO3 or a material containing LiNbO3 and at least one of the following additives: Mg, Zn, Sc or In. ### Claim 6 A method of fabricating a wavelength conversion device that includes a plurality of waveguides formed on a substrate of a nonlinear material and a plurality of slab waveguides that are arranged substantially in parallel with and spaced apart from the plurality of waveguides, the method comprising: a step of fabricating a guided light attenuator formed of a material having an index of refraction different from an index of refraction of a material forming the slab waveguides in the plurality of slab waveguides; a step of successively measuring an optical characteristic of the plurality of waveguides and selecting one waveguide having a desired optical characteristic from the plurality of waveguides; and a step of increasing at least the index of refraction of the material forming the guided light attenuator that is formed in the slab waveguide that is located on one side of the selected waveguide and adjacent to the selected waveguide. ### Claim 7 (depends on 6) The method according to claim 6, wherein the guided light attenuator is a groove formed in the slab waveguide as an internal region thereof by removing the material forming the slab waveguide, and the step of increasing the index of refraction of the material forming the guided light attenuator comprises: filling the groove with a material having an index of refraction greater than 1. ### Claim 8 (depends on 2) The wavelength conversion device according to claim 2, wherein on a face of the substrate, the guided light attenuator has a shape that is asymmetrical with respect to a light guide direction in the plurality of slab waveguides. ### Claim 9 (depends on 2) The wavelength conversion device according to claim 2, wherein the plurality of waveguides and the plurality of slab waveguides are straight waveguides, and a configuration parameter that determines a size of a core of each of the plurality of waveguides gradually varies between the plurality of waveguides. ### Claim 10 (depends on 3) The wavelength conversion device according to claim 3, wherein the plurality of waveguides and the plurality of slab waveguides are straight waveguides, and a configuration parameter that determines a size of a core of each of the plurality of waveguides gradually varies between the plurality of waveguides. ### Claim 11 (depends on 2) The wavelength conversion device according to claim 2, wherein the plurality of waveguides is made of LiNbO3 or a material containing LiNbO3 and at least one of the following additives: Mg, Zn, Sc or In. ### Claim 12 (depends on 3) The wavelength conversion device according to claim 3, wherein the plurality of waveguides is made of LiNbO3 or a material containing LiNbO3 and at least one of the following additives: Mg, Zn, Sc or In. ### Claim 13 (depends on 4) The wavelength conversion device according to claim 4, wherein the plurality of waveguides is made of LiNbO3 or a material containing LiNbO3 and at least one of the following additives: Mg, Zn, Sc or In. ### Claim 14 A wavelength conversion device, comprising: a plurality of waveguides formed on a substrate of a nonlinear material; a plurality of slab waveguides that are arranged substantially in parallel with and spaced apart from the plurality of waveguides; and guided light attenuators formed of a material having an index of refraction different from an index of refraction of a material forming the slab waveguide in the plurality of slab waveguides, wherein the guided light attenuator is a groove formed in the slab waveguide as an internal region thereof by removing the material forming the slab waveguide, and of slab waveguides adjacent to one of the plurality of waveguides, at least the groove formed in the slab waveguide on one side of the one waveguide is filled with a material having an index of refraction greater than 1, and wherein on a face of the substrate, the guided light attenuator has a shape that is asymmetrical with respect to a light guide direction in the plurality of slab waveguides.