# US 11,442,206 B2 · Image sensor comprising an array of interference filters

> Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt

- Number: US 11,442,206 B2
- Document ID: US11442206B2
- Status: Granted
- Kind: B2
- Application number: 16/434,104
- Filed: 2019-06-06
- Published: 2019-12-12
- Granted: 2022-09-13
- Earliest claimed: 2018-06-08
- Assignees: Commissariat A L'energie Atomique Et Aux Energies Alternatives
- Applicants: Commissariat à l'Énergie Atomique et aux Énergies Alternatives
- Inventors: Laurent Frey; Lilian Masarotto
- Web page: https://patentgrep.com/patent/US11442206B2

## CPC

- G02B 5/08: Mirrors {(vehicle mirrors involving special optical features B60R1/08)}
- G02B 5/28: Interference filters
- G02B 5/281: {designed for the infrared light}
- G02B 5/283: {designed for the ultraviolet}
- H04N 23/11: for generating image signals from visible and infrared light wavelengths
- H10F 39/8053: {Colour filters}
- G02B 5/201: {in the form of arrays}
- G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- H04N: PICTORIAL COMMUNICATION, e.g. TELEVISION
- H10F: INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION

## Abstract

A pixelated filter intended to rest on a support and including, in a stacking direction: first filter pixels each including a first interference filter covered with a first dielectric block; and second filter pixels each including a second dielectric block, having a thickness greater than or equal to the thickness of the first interference filter, covered with a second interference filter, having a thickness smaller than or equal to the thickness of the first dielectric block, wherein, for at least one of the second filter pixels, the second dielectric block of the second filter pixel is interposed between the first interference filters of two first filter pixels and the second interference filter of the second filter pixel is interposed between the first dielectric blocks of the first two filter pixels.

## Claims

### Claim 1

A pixelated interference filter intended to rest on a support and comprising, in a stacking direction:
first filter pixels each comprising a first interference filter covered with a first dielectric block; and
second filter pixels each comprising a second dielectric block, having a thickness greater than or equal to the thickness of the first interference filter, covered with a second interference filter, having a thickness smaller than or equal to the thickness of the first dielectric block,
wherein, for at least one of the second filter pixels, the second dielectric block of the second filter pixel is interposed between the first interference filters of two first filter pixels and the second interference filter of the second filter pixel is interposed between the first dielectric blocks of the first two filter pixels,
the pixelated interference filter comprising, between each pair of first and second adjacent filter pixels, a transition area having a minimum dimension between the first filter pixel and the second filter pixel of said pair, perpendicularly to the stacking direction, smaller than 500 nm,
and wherein the pixelated interference filter comprises first and second opposite surfaces, the first surface being in contact with the support and the second surface being substantially planar.

### Claim 2 (depends on 1)

The pixelated interference filter of claim 1, wherein each first interference filter comprises an alternation of first dielectric layers of a first dielectric material having a first refraction index in the visible range and of second dielectric layers of a second dielectric material having a second refraction index in the visible range smaller than the first refraction index and wherein each second interference filter comprises an alternation of third dielectric layers of a third dielectric material having a third refraction index in the infrared range and of fourth dielectric layers of a fourth dielectric material having a fourth refraction index in the infrared range smaller than the third refraction index; or
wherein each first interference filter comprises an alternation of the third dielectric layers and of the fourth dielectric layers and wherein each second interference filter comprises an alternation of the first dielectric layers and of the fourth dielectric layers.

### Claim 3 (depends on 2)

The pixelated interference filter of claim 2, wherein the first dielectric material may be selected from the group comprising silicon nitride, hafnium oxide, aluminum oxide, an alloy of aluminum, oxygen, and nitrogen, an alloy of silicon, oxygen, carbon, and nitrogen, silicon nitride, niobium oxide, tantalum oxide, titanium oxide, and mixtures of at least two of these compounds.

### Claim 4 (depends on 2)

The pixelated interference filter of claim 2, wherein the second dielectric material and/or the fourth dielectric material may each be selected from the group comprising silicon dioxide, magnesium fluoride, silicon oxide, silicon oxynitride, hafnium oxide, aluminum oxide, a film made up of aluminum, oxygen, and nitrogen, a film made up of silicon, oxygen, carbon, and nitrogen, silicon nitride, and mixtures of at least two of these compounds.

### Claim 5 (depends on 2)

The pixelated interference filter of claim 2, wherein the third dielectric material may be selected from the group comprising amorphous silicon, hydrogenated amorphous silicon, and mixtures of these compounds.

### Claim 6 (depends on 1)

An image sensor comprising a support and the pixelated interference filter of claim 1 resting on the support.

### Claim 7 (depends on 6)

The image sensor of claim 6, further comprising an antireflection layer between the support and the pixelated interference filter.

### Claim 8 (depends on 6)

The image sensor of claim 6, comprising, for each first filter and covering said first filter pixel, at least one color filter capable of giving way to visible light only in a first wavelength range and one color filter capable of giving way to visible light only in a second wavelength range different from the first range.

### Claim 9 (depends on 8)

The image sensor of claim 8, comprising, for each color filter of each first filter pixel, a first lens covering said color filter and comprising, for each second filter pixel, a second lens covering the second filter pixel.

### Claim 10 (depends on 1)

A method of manufacturing the pixelated interference filter of claim 1, comprising the successive steps of:
a) depositing, on a substrate, a first stack of dielectric layers having the structure of the first interference filters;
b) etching the first stack to remove the first stack from the locations of the second filter pixels and keep the first interference filters at the locations of the first filter pixels;
c) depositing a first insulating layer having a thickness greater than the thickness of the first stack, on the first interference filters and between the first interference filters;
d) etching at least a portion of the first insulating layer on the first interference filters;
e) depositing a second stack of dielectric layers having the structure of the second interference filters;
f) etching the second stack to remove the second stack from the locations of the first filter pixels and keep the second interference filters at the locations of the second filter pixels;
g) depositing a second insulating layer, having a thickness greater than the thickness of the second stack, on the second interference filters and between the second interference filters; and
h) etching at least a portion of the second insulating layer on the second interference filters.

### Claim 11 (depends on 10)

The method of claim 10, wherein, at step a), the first stack is deposited on a support comprising at least one raised area, the method comprising, at step b), etching the portion of the first stack covering the raised area.

### Claim 12 (depends on 10)

The method of claim 10, wherein the etching of the first insulating layer and/or of the second insulating layer comprises a chemical-mechanical polishing step.