# US 11,442,090 B2 · Systems and methods for measuring electrical characteristics of a material using a non-destructive multi-point probe > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 11,442,090 B2 - Document ID: US11442090B2 - Status: Granted - Kind: B2 - Application number: 16/460,432 - Filed: 2019-07-02 - Published: 2021-01-07 - Granted: 2022-09-13 - Earliest claimed: 2019-07-02 - Assignees: Utica Leaseco, LLC - Applicants: Utica Leaseco, LLC - Inventors: Jan Moritz Limpinsel; Octavi Santiago Escala Semonin; Edwin J. Rodriguez; Brendan M. Kayes; Vladimir N. Faifer - Web page: https://patentgrep.com/patent/US11442090B2 ## CPC - G01N 27/041: {of a solid body} - G01R 27/08: Measuring resistance by measuring both voltage and current - G01R 1/073: Multiple probes - G01R 1/0735: {arranged on a flexible frame or film} - G01R 31/2601: {Apparatus or methods therefor (G01R31/2607, G01R31/2642 take precedence)} - G01R 31/2648: {Characterising semiconductor materials (testing of materials or semi-finished products G01R31/2831; testing during manufacture H10P74/00)} - H01R 13/2414: {conductive elastomers} - G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q) - G01R: MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES (indicating correct tuning of resonant circuits H03J3/12) - H01R: ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS ## Abstract This disclosure describes an elastic multi-contact probe that includes conductive strips each of which comprises a conductive elastomer; dielectric strips formed on a back surface of a respective conductive strip; and a layer of a thermoplastic formed on back surfaces of the dielectric strips. The disclosure also describes a method that includes measuring a first I-V curve between a pair of inner probes of the an elastic multi-contact probe based on a first current applied to a pair of outer probes; determining a first slope of a linear region of the first I-V curve; measuring a second I-V curve between the pair of inner probes based on a second current applied to the pair of inner probes; determining a second slope of a linear region of the second I-V curve; and calculating a sheet resistance and a contact resistivity of the semiconductor material based on the first and second slopes. ## Claims ### Claim 1 An elastic multi-contact probe comprising: a plurality of conductive strips each of which comprises a conductive elastomer, the plurality of conductive strips being spaced apart from each other, and a front surface of the conductive strips being configured to be placed on a surface of a substrate to be probed; a plurality of dielectric strips, each of the plurality of dielectric strips being formed directly on a back surface of a respective one of the plurality of conductive strips, and wherein each of the plurality of dielectric strips mirror a shape of the respective one of the plurality of conductive strips; and a single layer of a thermoplastic formed on back surfaces of the dielectric strips such that the dielectric strips separate the plurality of conductive strips from the single layer of the thermoplastic. ### Claim 2 (depends on 1) The elastic multi-contact probe of claim 1, wherein the plurality of conductive strips comprises a plurality of linear conductive strips parallel to each other. ### Claim 3 (depends on 2) The elastic multi-contact probe of claim 2, wherein the plurality of linear conductive strips includes: a pair of outer conductive strips having a first length, and a pair of inner conductive strips having a second length that is shorter than the first length. ### Claim 4 (depends on 3) The elastic multi-contact probe of claim 3, wherein the plurality of dielectric strips comprises a plurality of linear dielectric strips having a same length as the respective conductive strip. ### Claim 5 (depends on 4) The elastic multi-contact probe of claim 4, wherein the plurality of linear dielectric strips includes: a pair of outer linear dielectric strips having the first length, and a pair of inner linear dielectric strips having the second length. ### Claim 6 (depends on 4) The elastic multi-contact probe of claim 4, wherein each of the linear dielectric strips has a same width as the respective linear conductive strip. ### Claim 7 (depends on 1) The elastic multi-contact probe of claim 1, wherein the plurality of conductive strips comprises a plurality of ring conductive strips, each of the ring conductive strips having a different radius and being concentric with a center of the elastic multi-contact probe. ### Claim 8 (depends on 7) The elastic multi-contact probe of claim 7, wherein the plurality of ring conductive strips comprises: a first ring conductive strip having a first radius, a second ring conductive strip having a second radius that is larger than the first radius, a third ring conductive strip having a third radius that is larger than the second radius, and a fourth ring conductive strip having a fourth radius that is larger than the third radius. ### Claim 9 (depends on 8) The elastic multi-contact probe of claim 8, wherein the plurality of dielectric strips comprises a plurality of ring dielectric strips, each of the ring dielectric strips having a same radius as the respective ring conductive strip. ### Claim 10 (depends on 9) The elastic multi-contact probe of claim 9, wherein each of the ring dielectric strips has a same width as the respective ring conductive strip. ### Claim 11 (depends on 1) The elastic multi-contact probe of claim 1, wherein the plurality of conductive strips comprises a solid conductive circle concentric with a center of the elastic multi-contact probe and a plurality of ring conductive strips, each of the ring conductive strips having a different radius and being concentric with the center of the elastic multi-contact probe. ### Claim 12 (depends on 11) The elastic multi-contact probe of claim 11, wherein: the solid conductive circle has a first radius, and the plurality of ring conductive strips comprises: a first ring conductive strip having a second radius that is larger than the first radius, a second ring conductive strip ring having a third radius that is larger than the second radius, and a third ring conductive strip having a fourth radius that is larger than the third radius. ### Claim 13 (depends on 12) The elastic multi-contact probe of claim 12, wherein the plurality of dielectric strips comprises a solid dielectric circle having a same radius as the solid conductive circle and a plurality of ring dielectric strips, each of the ring dielectric strips having a same radius as the respective ring conductive strip. ### Claim 14 (depends on 13) The elastic multi-contact probe of claim 13, wherein each of the ring dielectric strips has a same width as the respective ring conductive strip. ### Claim 15 (depends on 1) The elastic multi-contact probe of claim 1, wherein the plurality of dielectric strips comprises a dielectric rubber. ### Claim 16 (depends on 1) The elastic multi-contact probe of claim 1, wherein the layer of thermoplastic comprises a polyoxymethylene (POM). ### Claim 17 (depends on 1) The elastic multi-contact probe of claim 1, wherein the elastic multi-contact probe is attached to a self-aligning applicator. ### Claim 18 (depends on 17) The elastic multi-contact probe of claim 17, wherein the elastic multi-contact probe is configured to be adjusting using the self-aligning applicator.