# US 11,441,992 B2 · Method and apparatus for detection of particle size in a fluid > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 11,441,992 B2 - Document ID: US11441992B2 - Status: Granted - Kind: B2 - Application number: 16/885,257 - Filed: 2020-05-27 - Published: 2021-12-02 - Granted: 2022-09-13 - Earliest claimed: 2020-05-27 - Assignees: Applied Materials, Inc. - Applicants: Applied Materials, Inc. - Inventors: Mehdi Vaez-Iravani; Todd Egan; Guoheng Zhao - Web page: https://patentgrep.com/patent/US11441992B2 ## CPC - G01N 15/0227: using imaging; using holography - G01N 15/1434: Optical arrangements - G01N 15/1459: {the analysis being performed on a sample stream} - G01N 2015/0046: {in gas, e.g. smoke} - G01N 2015/0053: {in liquids, e.g. trouble} - G01N 2015/0238: {Single particle scatter} - G01N 2015/1438: {Using two lasers in succession} - G01N 2015/1493: {Particle size} - G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q) ## Abstract Examples disclosed herein generally relate to systems and methods for detecting the size of a particle in a fluid. In one example, a system for imaging a particle includes a first imaging device. The first imaging device includes a lens and a digital detector. The system further includes a laser source. He laser source is configured to emit a first laser beam and a second laser beam. The digital detector is configured to accumulate a metric of an intensity of an accumulated light that passes through the lens. The accumulated light is scattered from the particle. The accumulated light includes light from the first laser beam and the second laser beam. ## Claims ### Claim 1 A system for imaging a particle, comprising: a first imaging device comprising: a lens; and a digital detector; and a laser source configured to produce a first laser beam and a second laser beam, wherein the digital detector is configured to accumulate a metric of an intensity of an accumulated light that passes through the lens, the accumulated light is refracted from the particle, the accumulated light comprising light from the first laser beam passing through the lens and accumulated by the digital detector at a first time and comprising light from the second laser beam passing through the lens and accumulated by the digital detector at a second time occurring after the first time. ### Claim 2 (depends on 1) The system for imaging a particle as recited in claim 1, comprising: a laser terminator disposed in a path of the first laser beam and a path of the second laser beam, the laser terminator configured to interrupt the paths of the first and second laser beams. ### Claim 3 (depends on 1) The system for imaging a particle as recited in claim 1, comprising: an encapsulating section having an inlet for receiving the particle and an outlet for allowing the particle to exit the encapsulating section through the outlet. ### Claim 4 (depends on 3) The system for imaging a particle as recited in claim 3, comprising: a beam displacer disposed between the laser source and the encapsulating section, the beam displacer configured to displace the first laser beam from the second laser beam. ### Claim 5 (depends on 3) The system for imaging a particle as recited in claim 3, comprising: a beam displacer inside the encapsulating section, the beam displacer configured to displace the first laser beam from the second laser beam. ### Claim 6 (depends on 3) The system for imaging a particle as recited in claim 3, comprising: a beam displacer disposed between the laser source and the encapsulating section, the beam displacer configured to displace the first laser beam from the second laser beam; and a focusing lens disposed between the laser source and the encapsulating section. ### Claim 7 (depends on 6) The system for imaging a particle as recited in claim 6, wherein the beam displacer is configured to cause the second laser beam to polarize about 90 degrees from the first laser beam. ### Claim 8 (depends on 1) The system for imaging a particle as recited in claim 1, wherein the second laser beam is displaced from a direction of the first laser beam, and the second laser beam is polarized at about 90 degrees with respect to a polarization of the first laser beam by a beam displacer. ### Claim 9 (depends on 1) The system for imaging a particle as recited in claim 1, comprising: an encapsulating section configured to receive the first laser beam and the second laser beam; a first reflector configured to reflect the first laser beam; and a laser terminator configured to interrupt a path of the second laser beam. ### Claim 10 (depends on 1) The system for imaging a particle as recited in claim 1, comprising: an encapsulating section configured to receive the first laser beam and the second laser beam; and a laser terminator configured to interrupt a path of the first laser beam and the second laser beam. ### Claim 11 (depends on 1) The system for imaging a particle as recited in claim 1, comprising: an encapsulating section configured to receive the first laser beam and the second laser beam; a beam displacer configured to displace the first laser beam from the second laser beam; and a laser terminator configured to interrupt a path of the second laser beam. ### Claim 12 (depends on 1) The system for imaging a particle as recited in claim 1, comprising: a beam displacer configured generate and to displace the first laser beam from the second laser beam; wherein a polarization of the second laser beam is rotated by about 90 degrees with respect to that of the first laser beam. ### Claim 13 A particle imaging system, comprising: a first imaging device including: a lens; and a digital detector; an encapsulating section including an inlet configured to receive particles and an outlet configured to allow particles to exit the encapsulating section; and a laser source configured to produce a first laser beam and a second laser beam, wherein the digital detector is configured to accumulate a metric of an intensity of an accumulated light that passes through the lens, the accumulated light is diffracted from the particle and contains light from the first laser beam passing through the lens and accumulated by the digital detector at a first time and contains light from the second laser beam passing through the lens and accumulated by the digital detector at a second time occurring after the first time. ### Claim 14 (depends on 13) The particle imaging system as recited in claim 13, comprising: a beam displacer disposed between the laser source and the encapsulating section, the beam displacer configured to displace the first laser beam from the second laser beam. ### Claim 15 (depends on 13) The particle imaging system as recited in claim 13, comprising: a beam displacer disposed inside the encapsulating section, the beam displacer configured to displace the first laser beam from the second laser beam. ### Claim 16 (depends on 13) The particle imaging system as recited in claim 13, comprising: a beam displacer disposed between the laser source and the encapsulating section, the beam displacer configured to displace the first laser beam from the second laser beam; and a focusing lens disposed between the laser source and the encapsulating section. ### Claim 17 (depends on 13) The particle imaging system as recited in claim 13, wherein the second laser beam is polarized by about 90 degrees from the first laser beam. ### Claim 18 A method of determining particle size, comprising: producing a first laser beam and a second laser beam from a laser source; separating the second laser beam from the first laser beam by a distance; and passing the first laser beam through an encapsulating section, the encapsulating section configured to allow a particle to flow therethrough; accumulating, by a digital detector, a first metric of a first intensity of a first light that passes through a lens of an imaging device, the first light diffracted from a particle that passes through the first laser beam at a first time; accumulating, by the digital detector, a second metric of a second intensity of a second light that passes through the lens of the imaging device, the second light diffracted from the particle that passes through the second laser beam at a second time occurring after the first time, and wherein each of the first light and the second light pass through the lens; and classifying a particle size based upon the first metric and the second metric. ### Claim 19 (depends on 18) The method of determining particle size according to claim 18, further comprising: polarizing the second laser beam by about 90 degrees from the first laser beam. ### Claim 20 (depends on 18) The method of determining particle size according to claim 18, further comprising: displacing the second laser beam a distance from the first laser beam upon passing the first laser beam through a beam displacer.