# US 11,441,961 B2 · Method for forming pressure sensor involves filling a chamber with non compressible fluid and shaping etched cladding to convert external pressure within chamber by anisotropic stress

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- Number: US 11,441,961 B2
- Document ID: US11441961B2
- Status: Granted
- Kind: B2
- Application number: 16/753,165
- Filed: 2018-11-13
- Published: 2020-08-06
- Granted: 2022-09-13
- Earliest claimed: 2017-11-20
- Assignees: Halliburton Energy Services, Inc.
- Applicants: Halliburton Energy Services, Inc.
- Inventors: Crispin Doyle; Dirk Havermann
- Web page: https://patentgrep.com/patent/US11441961B2

## CPC

- G01L 11/025: {using a pressure-sensitive optical fibre}
- G01L 1/246: {using integrated gratings, e.g. Bragg gratings}
- G02B 6/02076: {Refractive index modulation gratings, e.g. Bragg gratings}
- G02B 6/022: {using mechanical stress, e.g. tuning by compression or elongation, special geometrical shapes such as "dog-bone" or taper (G02B6/02204 takes precedence; optical modulation using photo-elastic effect G02F1/0131)}
- G02B 6/274: {based on light guide birefringence, e.g. due to coupling between light guides (G02B6/105, G02B6/024 take precedence; mechanically induced birefringence G02F1/0134)}
- G02B 2006/12138: {Sensor}
- G01L: MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE (weighing G01G)
- G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS

## Abstract

A method for forming a pressure sensor is provided wherein an optical fibre is provided, the optical fibre comprising a core, a cladding surrounding the core, and a birefringence structure for inducing birefringence in the core. The birefringence structure comprises first and second holes enclosed within the cladding and extending parallel to the core. A portion of the optical fibre comprising of the core and the birefringence structure is encased within a chamber, wherein the chamber is defined by a housing comprising a pressure transfer element for equalising pressure between the inside and the outside of the housing. An optical sensor is provided along the core of the optical fibre. The cladding is internally etched by flowing an etchant through the first and second holes along a length of the portion of optical fibre which comprises the optical sensor so as to increase the width of the first and second holes. The chamber is filled with a substantially non-compressible fluid. Consequently, the etched cladding is shaped so as to convert an external pressure provided by the non-compressible fluid within the chamber to an anisotropic stress in the optical sensor.

## Claims

### Claim 1

A method for forming a pressure sensor comprising:
providing an optical fibre comprising a core, a cladding surrounding the core, and a birefringence structure for inducing birefringence in the core, wherein the birefringence structure comprises first and second holes enclosed within the cladding and extending parallel to the core;
encasing a portion of the optical fibre comprising the core and the birefringence structure within a chamber, wherein the chamber is defined by a housing comprising a pressure transfer element for equalising pressure between the inside and the outside of the chamber;
providing an optical sensor along the core of the portion of optical fibre;
internally etching the cladding by flowing an etchant through the first and second holes along a length of the portion of optical fibre which comprises the optical sensor so as to increase the width of the first and second holes;
heating the cladding during the internal etching using a localised heat source so as to increase the internal etching rate in a region of the encased portion encompassing the optical sensor; and
filling the chamber with a substantially non-compressible fluid;
wherein the etched cladding is shaped so as to convert an external pressure provided by the non-compressible fluid within the chamber to an anisotropic stress in the optical sensor, wherein the internal etching causes the first and second holes to have a larger cross sectional area along the region of the portion encompassing the optical sensor than along another region of the portion not encompassing the optical sensor.

### Claim 2 (depends on 1)

A method according to claim 1, wherein the first and second holes remain enclosed within the cladding after the internal etching.

### Claim 3 (depends on 1)

A method according to claim 1, wherein the localised heat source comprises a resistive coil, a Peltier heater or an induction coil.

### Claim 4 (depends on 1)

A method according to claim 1, wherein the axes of the first and second holes and the core lie within a common plane.

### Claim 5 (depends on 1)

A method according to claim 1, wherein the birefringence structure further comprises third and fourth holes enclosed within the cladding and extending parallel to the core, the method further comprising:
externally etching the cladding along a length of the portion of optical fibre which comprises the optical sensor so as to expose the third and fourth holes.

### Claim 6 (depends on 5)

A method according to claim 5, wherein the perimeter of the externally etched cladding comprises a partial outline of the third and fourth holes.

### Claim 7 (depends on 5)

A method according to claim 5, wherein said external etching is performed using laser ablation.

### Claim 8 (depends on 7)

A method according to claim 7, wherein the housing further comprises a window for transmitting a laser beam directed onto the length of the portion of optical fibre.

### Claim 9 (depends on 5)

A method according to claim 5, wherein external etching comprises flowing an etching fluid into the chamber and immersing the outside of the cladding in said etching fluid until the third and fourth holes are exposed.

### Claim 10 (depends on 9)

A method according to claim 9, further comprising flushing the etching fluid from the chamber prior to filling the chamber with the substantially non-compressible fluid.

### Claim 11 (depends on 5)

A method according to claim 5, wherein the axes of the core and the first and second holes lie within a first plane, and wherein the axes of the core and the third and fourth holes lie within a second plane, the second plane being different from the first plane.

### Claim 12 (depends on 5)

A method according to claim 5, wherein the birefringence structure further comprises one or more additional holes enclosed within the cladding and extending parallel to the core, wherein the additional holes remain enclosed within the cladding after said internal and external etching.

### Claim 13 (depends on 1)

A method according to claim 1, wherein the birefringence structure further comprises third and fourth holes enclosed within the cladding and extending parallel to the core, wherein the core is arranged between the first hole and the second hole, and wherein the core is arranged between the third hole and the fourth hole, and wherein the internal etching causes the first hole to merge with the fourth hole and the second hole to merge with the third hole.

### Claim 14 (depends on 13)

A method according to claim 13, wherein internally etching the cladding comprises flowing an etchant through the third and fourth holes along a length of the portion of optical fibre which comprises the optical sensor so as to increase the width of the third and fourth holes.

### Claim 15 (depends on 1)

A method according to claim 1, wherein the core is pre-formed to exhibit birefringence.

### Claim 16 (depends on 1)

A method according to claim 1, further comprising splicing one or each end of the optical fibre protruding from the housing with a single-mode optical fibre.

### Claim 17

A pressure sensor comprising:
a housing defining a chamber, the housing comprising a pressure transfer element for equalising pressure between the inside and the outside of the chamber;
a substantially non-compressible fluid contained within the chamber; and
an optical fibre, wherein a portion of the optical fibre is encased within the chamber, the portion comprising a core, an optical sensor provided along the core, a cladding surrounding the core, and a birefringence structure for inducing birefringence in the core, wherein the birefringence structure comprises first and second holes enclosed within the cladding and extending parallel to the core, and wherein the first and second holes have a larger cross sectional area along a region of the portion encompassing the optical sensor than along another region of the portion not encompassing the optical sensor.

### Claim 18 (depends on 17)

A pressure sensor according to claim 17, further comprising an etching member for enabling etching of the cladding within the chamber.

### Claim 19 (depends on 18)

A pressure sensor according to claim 18, wherein the etching member comprises a conduit configured to enable a flow of etchant to and from the chamber.

### Claim 20 (depends on 18)

A pressure sensor according to claim 18, wherein the cladding has a non-elliptical outline as viewed in a plane having a normal parallel to the axis of the core.

### Claim 21 (depends on 20)

A pressure sensor according to claim 20, wherein the outline comprises two re-entrant features.

### Claim 22 (depends on 17)

A pressure sensor according to claim 17, wherein the first and second holes are dumbbell shaped along the portion encompassing the optical sensor, when viewed in a plane having a normal parallel to the core.

### Claim 23 (depends on 17)

A pressure sensor according to claim 17, wherein the optical fibre protrudes from one or each end of the encased portion.

### Claim 24 (depends on 17)

A pressure sensor according to claim 17, wherein the optical sensor comprises a Fibre Bragg Grating.

### Claim 25 (depends on 17)

A pressure sensor according to claim 17, wherein the pressure transfer element is a flexible member.

### Claim 26 (depends on 17)

A pressure sensor according to claim 17, wherein the pressure transfer element is an orifice.

### Claim 27 (depends on 17)

A system for monitoring pressure comprising:
a pressure sensor according to claim 17;
a light source optically coupled to the encased portion of optical fibre; and
a detector configured to receive light transmitted by the light source along the optical fibre.

### Claim 28 (depends on 27)

A system according to claim 27, wherein the optical sensor is configured to simultaneously reflect light at two peak wavelengths, and wherein the detector is configured to monitor the pressure of the non-compressible fluid from the difference between the two peak wavelengths.