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US 11,441,942 B2Granted
Photoresist spectral sensitivity matching radiometer for trace/space width variation improvement
AssigneeHutchinson Technology Incorporated
InventorsMatthew S. Lang, Lawrence E. LaLonde, Kyle T. Tobias
Life of this patent
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Abstract
A radiometer probe for matching a spectral sensitivity of a dry-film resist is provided. The radiometer probe includes a light probe and a filter-diffuser assembly connected to the light probe. The filter-diffuser assembly includes a filter housing configured to receive an optical diffuser positioned on a filter. The optical diffuser and the filter are separated by a spacer.
Claims20
A radiometer probe for matching a spectral sensitivity of a dry-film resist comprising:
- a light probe;
- and
- a filter-diffuser assembly connected to the light probe, the filter-diffuser assembly including a filter housing configured to receive an optical diffuser positioned on a filter, the optical diffuser and the filter are separated by a spacer such that the radiometer probe is configured to expose a pattern on the dry-film resist to form at least one set of adjacent structures, having a space of less than 12 microns between one structure and an adjacent structure of the set.
A method for calibrating a radiometer probe, the method comprising:
- implementing the radiometer probe including a light probe and a filter-diffuser assembly threaded onto the light probe, the filter-diffuser assembly including a filter housing configured to receive an optical diffuser positioned on a filter, wherein the optical diffuser and the filter are separated by a spacer;
- implementing a light source;
- placing the radiometer probe under the light source and measuring an irradiance;
- comparing the measured irradiance with a standard irradiance;
- and
- calibrating the radiometer probe based on the compared measured irradiance with the standard irradiance such that the radiometer probe is configured to expose a pattern on a dry-film resist to form at least one set of adjacent structures, having a space of less than 12 microns between one structure and an adjacent structure of the set.
3 more elements
Dependencies are inferred from the claim text.