# US 11,441,555 B2 · Pump > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 11,441,555 B2 - Document ID: US11441555B2 - Status: Granted - Kind: B2 - Application number: 17/182,337 - Filed: 2021-02-23 - Published: 2021-07-01 - Granted: 2022-09-13 - Earliest claimed: 2018-11-27 - Assignees: Murata Manufacturing Co., Ltd. - Applicants: Murata Manufacturing Co., Ltd. - Inventors: Nobuhira Tanaka - Web page: https://patentgrep.com/patent/US11441555B2 ## CPC - F04B 45/047: Pumps having electric drive - F04B 43/046: {with piezoelectric drive} - F04B 43/095: {Piezoelectric drive} - F04B: POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS (machines for liquids, or pumps, of rotary-piston or oscillating-piston type F04C; non-positive-displacement pumps F04D; pumping of fluid by direct contact of another fluid or by using inertia of fluid to be pumped F04F) ## Abstract A pump includes a vibrating plate having a piezoelectric body on a first main surface, a cover including a top panel and a side wall, the top panel opposing a second main surface of the vibrating plate opposite to the first main surface, the top panel having a first cavity, and the side wall being connected to an outer peripheral portion of the top panel to surround a space between the top panel and the vibrating plate, a support portion connected to the side wall and supporting an outer periphery of the vibrating plate, and a second cavity formed between the side wall and the vibrating plate in a cross-sectional view in a direction orthogonal to a direction in which the second main surface of the vibrating plate and a main surface of the top panel oppose each other. ## Claims ### Claim 1 A pump, comprising: a vibrating plate having a piezoelectric body on a first main surface; a cover including a top panel and a side wall, the top panel opposing a second main surface of the vibrating plate opposite to the first main surface, the top panel having a first cavity, and the side wall being connected to an outer peripheral portion of the top panel to surround a space between the top panel and the vibrating plate; a support portion connected to the side wall and supporting an outer periphery of the vibrating plate; and a second cavity provided between the side wall and the vibrating plate in a cross-sectional view in a direction orthogonal to a direction in which the second main surface of the vibrating plate and a main surface of the top panel oppose each other, wherein the first cavity in the top panel is located to oppose a portion of the vibrating plate having a displacement amount smaller than a displacement amount of an outer peripheral edge of the vibrating plate. ### Claim 2 (depends on 1) The pump according to claim 1, wherein a center portion and the outer peripheral edge of the vibrating plate vibrate in opposite phases, and wherein the first cavity of the top panel is located closer to a portion of the vibrating plate serving as a node of vibrations than to the outer peripheral edge of the vibrating plate. ### Claim 3 (depends on 1) The pump according to claim 1, wherein the first cavity of the top panel is located in an inward direction from a portion of the vibrating plate serving as a node of vibrations. ### Claim 4 (depends on 1) The pump according to claim 1, wherein the vibrating plate is circular, and a center portion and the outer peripheral edge of the vibrating plate vibrate in opposite phases, and wherein a portion of the vibrating plate having a displacement amount smaller than a displacement amount of the outer peripheral edge of the vibrating plate is located equal to or more than 45% and equal to or less than 81% of a radius of the vibrating plate away from a center of the vibrating plate. ### Claim 5 (depends on 1) The pump according to claim 1, wherein the support portion has a beam shape extending along the outer peripheral edge of the vibrating plate. ### Claim 6 (depends on 1) The pump according to claim 1, wherein the support portion has greater flexibility than the vibrating plate. ### Claim 7 (depends on 1) The pump according to claim 1, wherein the support portion is connected to an entire circumference of the outer periphery of the vibrating plate. ### Claim 8 (depends on 6) The pump according to claim 6, wherein the support portion is thinner than the vibrating plate. ### Claim 9 (depends on 6) The pump according to claim 6, wherein the vibrating plate is composed of a metal, and wherein the support portion is composed of a resin. ### Claim 10 (depends on 1) The pump according to claim 1, further comprising a valve having one portion connected to the outer peripheral edge of the vibrating plate, and another portion serving as an open end. ### Claim 11 (depends on 1) The pump according to claim 1, wherein the top panel has a recess located in an outward direction from the first cavity. ### Claim 12 (depends on 1) The pump according to claim 1, wherein the top panel has a hollow at a center portion on a surface facing the vibrating plate. ### Claim 13 (depends on 1) The pump according to claim 1, further comprising an auxiliary plate held between the vibrating plate and the piezoelectric body. ### Claim 14 (depends on 2) The pump according to claim 2, wherein the first cavity of the top panel is located in an inward direction from a portion of the vibrating plate serving as a node of vibrations. ### Claim 15 (depends on 2) The pump according to claim 2, wherein the support portion has a beam shape extending along the outer peripheral edge of the vibrating plate. ### Claim 16 (depends on 3) The pump according to claim 3, wherein the support portion has a beam shape extending along the outer peripheral edge of the vibrating plate. ### Claim 17 (depends on 4) The pump according to claim 4, wherein the support portion has a beam shape extending along the outer peripheral edge of the vibrating plate. ### Claim 18 (depends on 2) The pump according to claim 2, wherein the support portion has greater flexibility than the vibrating plate. ### Claim 19 (depends on 3) The pump according to claim 3, wherein the support portion has greater flexibility than the vibrating plate. ### Claim 20 (depends on 4) The pump according to claim 4, wherein the support portion has greater flexibility than the vibrating plate.