# US 11,441,353 B2 · Beam-steering system based on a MEMS-actuated vertical-coupler array > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 11,441,353 B2 - Document ID: US11441353B2 - Status: Granted - Kind: B2 - Application number: 17/252,671 - Filed: 2019-06-19 - Published: 2021-04-22 - Granted: 2022-09-13 - Earliest claimed: 2018-06-19 - Assignees: The Regents of the University of California - Applicants: The Regents of the University of California - Inventors: Xiaosheng Zhang; Ming Chiang A Wu; Andrew S Michaels; Johannes Henriksson - Web page: https://patentgrep.com/patent/US11441353B2 ## CPC - E06B 9/80: Safety measures against dropping or unauthorised opening; Braking or immobilising devices; Devices for limiting unrolling (securing devices or arrangements for direct manual operation E06B9/78) - G02F 1/29: for the control of the position or the direction of light beams, i.e. deflection - E06B 9/325: Immobilising devices preventing raising - E06B 9/326: Details of cords, e.g. buckles, drawing knobs - E06B 9/34: roller-type; {Roller shutters with adjustable lamellae} - E06B 9/42: Parts or details of roller blinds, e.g. suspension devices, blind boxes (brackets or adjustable mountings for roller blinds and drawable curtains A47H1/13) - G02F 1/292: {by controlled diffraction or phased-array beam steering (controlled diffraction for optical switching G02F1/31)} - G02F 1/3132: {of directional coupler type} - G02F 1/3137: {with intersecting or branching waveguides, e.g. X-switches and Y-junctions} - E06B: FIXED OR MOVABLE CLOSURES FOR OPENINGS IN BUILDINGS, VEHICLES, FENCES OR LIKE ENCLOSURES IN GENERAL, e.g. DOORS, WINDOWS, BLINDS, GATES (shades or blinds for greenhouses A01G9/22; curtains A47H; lids for car boots or bonnets B62D25/10; skylights E04B7/18; sunshades, awnings E04F10/00) - G02F: OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS ## Abstract An integrated-optics MEMS-actuated beam-steering system is disclosed, wherein the beam-steering system includes a lens and a programmable vertical coupler array having a switching network and an array of vertical couplers, where the switching network can energize of the vertical couplers such that it efficiently emits the light into free-space. The lens collimates the light received from the energized vertical coupler and directs the output beam along a propagation direction determined by the position of the energized vertical coupler within the vertical-coupler array. In some embodiments, the vertical coupler is configured to correct an aberration of the lens. In some embodiments, more than one vertical coupler can be energized to enable steering of multiple output beams. In some embodiments, the switching network is non-blocking. ## Claims ### Claim 1 A beam-steering system comprising: a lens; and a programmable vertical coupler array comprising: a substrate; an array of couplers having a plurality of coupler rows and a plurality of coupler columns, each coupler of the array including a coupler waveguide having a movable end and a fixed end that includes a vertical-coupling element that is immovable relative to the substrate, the vertical-coupling element being configured to launch optical energy received from the coupler waveguide into free space; a bus waveguide disposed on the substrate, the bus waveguide having a first input port configured to receive a first light signal; a first plurality of row waveguides disposed on the substrate; and a switching network that is operative for controlling the propagation of the first light signal from the first input port to any coupler of the array; wherein the lens and programmable vertical coupler array are arranged such that the lens receives the optical energy launched by each vertical-coupling element and directs the optical energy in a direction that is based on the position of that vertical-coupling element within the programmable vertical coupler array and a relative position of the lens and the programmable vertical coupler array. ### Claim 2 (depends on 1) The system of claim 1 wherein the switching network includes: a row switch that includes a plurality of input ports for receiving a plurality of light signals from the bus waveguide, and wherein the row switch is operative for directing each light signal of the plurality thereof to any of the first plurality of row waveguides; and a plurality of column switches, each column switch being operatively coupled with a different row waveguide and a different coupler row, wherein each column switch is configured to enable optical coupling between its respective row waveguide and any coupler of its respective coupler row. ### Claim 3 (depends on 1) The system of claim 1 wherein each of the first plurality of row waveguides comprises a second plurality of row waveguides, and wherein the switching network includes: a row switch that includes a plurality of input ports for receiving a plurality of light signals from the bus waveguide, and wherein the row switch is operative for directing each light signal of the plurality thereof to any of the first plurality of row waveguides; and a plurality of column switches, each column switch being operatively coupled with the row switch by the second plurality of row waveguides, wherein each column switch is configured to enable optical coupling between each of its respective second plurality of row waveguides and any coupler of its respective coupler row. ### Claim 4 (depends on 3) The system of claim 3, wherein the switching network is non-blocking thereby enabling any coupler to receive one of the plurality of light signals regardless of whether any other coupler is receiving one of the plurality of light signals. ### Claim 5 (depends on 1) The system of claim 1 wherein the lens is selected from the group consisting of a single lens, a compound lens; a telecentric lens; a telescope; and a cellphone lens. ### Claim 6 (depends on 1) The system of claim 1 wherein at least one coupler of the array is configured to at least partially correct an aberration of the lens. ### Claim 7 (depends on 1) The system of claim 1 wherein the switching network includes: a row switch that includes the first input port and a first plurality of MEMS optical switches, each MEMS optical switch being operatively coupled with the bus waveguide and a different row waveguide and having (1) a first state in which the bus waveguide is optically decoupled from its respective row waveguide and (2) a second state in which the bus waveguide and its respective row waveguide are optically coupled; and a column switch that includes a plurality of column switch arrays, wherein each column switch array includes a second plurality of MEMS optical switches, each MEMS optical switch being operatively coupled with a different row waveguide and a different coupler of its respective coupler column and having (1) a first state in which its respective row waveguide is optically decoupled from its respective coupler and (2) a second state in which its respective row waveguide and its respective coupler are optically coupled. ### Claim 8 (depends on 7) The system of claim 7 wherein the second plurality of MEMS optical switches of at least one column switch array are configured such that they are all controlled with the same control signal. ### Claim 9 (depends on 7) The system of claim 7 wherein each MEMS optical switch of the first plurality thereof includes: a shunt waveguide that is movable relative to the substrate and having a first end and a second end; and a MEMS actuator that is configured to move the shunt waveguide between (1) a first position in which the bus waveguide is optically decoupled from its respective row waveguide and (2) a second position in which the bus waveguide is optically coupled with its respective row waveguide; wherein, when the MEMS actuator is in the second position: the first end and a first waveguide portion of the bus waveguide collectively define a first directional coupler that enables optical energy to couple from the bus waveguide into the shunt waveguide; and the second end and a second waveguide portion of its respective row waveguide collectively define a second directional coupler that enables optical energy to couple from the shunt waveguide into its respective row waveguide. ### Claim 10 (depends on 9) The method of claim 9, wherein the first directional coupler comprises an adiabatic coupler. ### Claim 11 (depends on 7) The system of claim 7 wherein each MEMS optical switch of the second plurality thereof includes: a MEMS actuator that is configured to move the movable end between (1) a first position in which the coupler waveguide is optically decoupled from its respective row waveguide and (2) a second position in which the coupler waveguide is optically coupled with its respective row waveguide; wherein, when the MEMS actuator is in the second position, the movable end and its respective row waveguide collectively define a directional coupler that enables optical energy to couple from its respective row waveguide into the coupler waveguide. ### Claim 12 (depends on 7) The system of claim 7 wherein each MEMS optical switch of the second plurality thereof includes: the coupler waveguide of its respective coupler, the coupler waveguide including the vertical-coupling element; and a MEMS actuator that is configured to move the coupler waveguide between (1) a first position in which the coupler waveguide is optically decoupled from the respective row waveguide and (2) a second position in which the coupler waveguide is optically coupled with the respective row waveguide; wherein, when the MEMS actuator is in the second position, the coupler waveguide and the respective row waveguide collectively define a directional coupler that enables optical energy to couple from the respective row waveguide into the vertical-coupling element. ### Claim 13 (depends on 1) The system of claim 1 further comprising a controller that is operative for controlling the relative position of the lens and the programmable vertical coupler array. ### Claim 14 (depends on 13) The method of claim 13, wherein the controller is operative to move the lens in a first lateral direction relative to the programmable vertical coupler array to direct the optical energy between angles dictated by fixed positions of each vertical-coupling element within the array. ### Claim 15 (depends on 1) The system of claim 1 wherein at least one vertical-coupling element of the plurality thereof comprises an optical element selected from the group consisting of a diffraction grating, a prism, a hologram, a two-dimensional grating structure, a diffractive lens, a blazed-grating element, a refractive lens, an angle-etched waveguide-facet mirror, an angle-etched waveguide, and an angled mirror. ### Claim 16 (depends on 1) The system of claim 1, further comprising a LiDAR system monolithically integrated with the semiconductor beam-steering device. ### Claim 17 (depends on 1) The system of claim 1, wherein portions of the bus waveguide and plurality of row waveguides are arranged such that there is no waveguide crossing between them. ### Claim 18 A method for steering an optical beam, the method comprising: receiving a light signal with an input of a bus waveguide of a beam-steering device, the bus waveguide being disposed on a substrate; controlling a MEMS switching network of the beam-steering device to direct propagation of the light signal from the input to at least one coupler of a coupler array of the beam-steering device, each coupler of the coupler array including a coupler waveguide having a movable end and a fixed end that includes a vertical-coupling element that is immovable with respect to the substrate, the vertical-coupling element being configured to launch optical energy received from the coupler waveguide into free space; optically coupling the at least one coupler to the light signal to launch optical energy from the at least one coupler into free space; and arranging a lens of the beam-steering device to direct the optical energy as an output beam. ### Claim 19 (depends on 18) The method of claim 18 wherein controlling the MEMS switching network further comprises: controlling a first MEMS optical switch of the beam-steering device to couple the light signal into a first row waveguide of the beam-steering device; and controlling a second MEMS optical switch of the beam-steering device to couple the light signal from the first row waveguide to the at least one coupler. ### Claim 20 (depends on 19) The method of claim 19 wherein controlling the first MEMS optical switch further comprises: moving a shunt waveguide of the first MEMS optical switch with a MEMS actuator between (1) a first position in which the bus waveguide is optically decoupled from the first row waveguide and (2) a second position in which the bus waveguide is optically coupled with the first row waveguide. ### Claim 21 (depends on 19) The method of claim 19 wherein controlling the MEMS switching network further comprises controlling a plurality of MEMS optical switches in a first column switch array of the beam-steering device with a first control signal to couple the light signal into at least one row waveguide of the of the beam-steering device. ### Claim 22 (depends on 19) The method of claim 19 wherein controlling the second MEMS optical switch further comprises: moving the movable end of the at least one coupler with a MEMS actuator between (1) a first position in which the at least one coupler is optically decoupled from the first row waveguide and (2) a second position in which the at least one coupler is optically coupled with the first row waveguide. ### Claim 23 (depends on 22) The method of claim 22, wherein, when the MEMS actuator is in the second position, the movable end and the first row waveguide collectively define a directional coupler that enables optical energy to couple from the first row waveguide into the at least one coupler. ### Claim 24 (depends on 19) The method of claim 19, wherein, when the MEMS actuator is in the second position, the shunt waveguide and the bus waveguide collectively define a first directional coupler that enables optical energy to couple from the bus waveguide into the shunt waveguide; and the shunt waveguide and the first row waveguide collectively define a second directional coupler that enables optical energy to couple from the shunt waveguide into the first row waveguide. ### Claim 25 (depends on 18) The method of claim 18 wherein the light signal comprises a plurality of light signals, and wherein controlling the MEMS switching network further comprises: receiving the plurality of light signals with a plurality of input ports of a row switch of the beam-steering device; directing the plurality of light signals into any of a plurality of row waveguides with a row switch of the beam-steering device; and optically coupling any of the at least one coupler of the coupler array with its respective row waveguide with at least one of a plurality of column switches of the beam-steering device. ### Claim 26 (depends on 25) The method of claim 25 further comprising controlling the MEMS switching network to be non-blocking such that any of the at least one coupler of the coupler array can receive the light signal regardless of whether any other of at least one coupler of the coupler array is receiving the light signal. ### Claim 27 (depends on 18) The method of claim 18 wherein the lens is selected from the group consisting of a single lens, a compound lens; a telecentric lens; a telescope; and a cellphone lens. ### Claim 28 (depends on 18) The method of claim 18 further comprising correcting an aberration of the lens at the at least one coupler of the coupler array. ### Claim 29 (depends on 18) The method of claim 18 wherein arranging the lens further comprises controlling a relative position of the lens with respect to the coupler array. ### Claim 30 (depends on 18) The method of claim 18, further comprising using the output beam in a LiDAR system for light detection and ranging.